Inspection method and inspection apparatus
View Patent ↗The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.
1. An inspection apparatus comprising:
an illumination unit configured to illuminate an object with light,
a spatial filter, and
a changing unit which changes type of diffraction pattern formed on said spatial filter as a function of type of pattern formed on the object.
2. The inspection apparatus according to claim 1 , wherein said changing unit is arranged at optical path of said illumination unit.
3. The inspection apparatus according to claim 2 , wherein said changing unit is a diaphragm.
4. The inspection apparatus according to claim 2 , wherein said changing unit is a movable beam expander.
5. The inspection apparatus according to claim 1 , wherein a shading pattern of said spatial filter coincides with said diffraction pattern changed by said changing unit.
6. The inspection apparatus according to claim 1 , wherein said changing unit which changes said type of diffraction pattern as a function of type of memory pattern formed on said object.
7. The inspection apparatus according to claim 1 , wherein said illumination unit illuminates two or more types patterns on said object.