Apparatus for manufacturing semiconductor
Disclosed is an apparatus for manufacturing semiconductors, to be used for various processes in semiconductor manufacture processing, such as the forming of layers on wafers. A tube has a processing space therein and a discharge hole at a side thereof. A boat can be loaded and unloaded through a lower opening of the tube. Susceptors are vertically separated from one another and supported within the boat, have a central hole defined in the respective centers of rotation thereof, and have a plurality of wafers stacked around a central perimeter on the respective top surfaces thereof. A supply tube is installed at the top of the boat and passes through each central hole of the susceptors, and defines discharge holes for discharging processing gas supplied from the outside onto each top surface of the susceptors.
1. An apparatus for manufacturing a semiconductor, the apparatus comprising:
a tube configured to have a process space inside and a drain outlet at one end;
a boat configured to be moved in and out of the tube through a open lower portion of the tube;
a plurality of susceptors configured to be arranged in the boat apart from one another in a vertical direction, and each having a center hole on a center of rotation and having a top surface on which a plurality of wafers are loaded around a center; and
a supply pipe configured to be installed to penetrate the center hole of each susceptor from a top of the boat and to have ejection nozzles, each ejecting a process gas provided from an external source to the top surface of each susceptor.
2. The apparatus of claim 1 , wherein the ejection nozzles are configured to eject the process gas horizontally and portions on the top surface of each susceptor, each on which the wafer is loaded, are inclined upwardly toward an outer edge of the susceptor such that a uniform film is formed on each wafer.
3. The apparatus of claim 1 , wherein portions on the top surface of each susceptor, each on which the wafer is loaded, are formed horizontally and the ejection nozzles are formed to eject the process gas to the susceptors at an angle to form a uniform film on each wafer.
4. The apparatus of claim 1 , wherein the boat is configured to be rotated by a rotation device so that the susceptors can rotate with respect to the supply pipe.
5. The apparatus of claim 4 , further comprising:
a supplementary supply pipe configured to additionally provide a process gas inside the tube.
6. The apparatus of claim 5 , wherein the supplementary supply pipe is configured to have a triple-pipe configuration including a first supply channel to provide a first process gas, a second supply channel to provide a second process gas, and a third supply channel to provide a cooling medium wherein the first, second and third supply channels are disposed concentrically.
7. The apparatus of claim 1 , wherein the supply pipe is configured to have a triple-pipe configuration including a first supply channel to provide a first process gas, a second supply channel to provide a second process gas, and a third supply channel to provide a cooling medium wherein the first, second and third supply channels are disposed concentrically.