IP Library Granted Patent US 8,395,150
Granted Patent B2
US 8,395,150 · App. 13/351,050 · Granted Mar 12, 2013

Inorganic-organic hybrid thin-film transistors using inorganic semiconducting films

Inventors: Tobin J. Marks (Evanston, IL); Antonio Facchetti (Chicago, IL); Lian Wang (Evanston, IL); Myung-Han Yoon (Cambridge, MA); Yu Yang (Santa Clara, CA)
Assignee: Northwestern University
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Quick Facts
Patent No.
US 8,395,150
App. No.
13/351,050
Granted
Mar 12, 2013
Kind
B2
Abstract

Inorganic semiconducting compounds, composites and compositions thereof, and related device structures.

Claims (20)

1. A thin film transistor device comprising an inorganic-organic hybrid thin film composition, the inorganic-organic hybrid thin film composition comprising an inorganic semiconductor component coupled to an organic component, wherein the inorganic semiconductor component is a channel layer and comprises a metal oxide comprising indium, and wherein the organic component comprises chemical moieties that can afford substrate sorption, condensation, or intermolecular crosslinking.

2. The device of claim 1 , wherein the inorganic semiconductor component comprises a metal oxide comprising indium and one or more metals independently selected from a Group 12 metal and a Group 13 metal.

3. The device of claim 1 , wherein the inorganic semiconductor component is derived from a metal oxide target comprising indium.

4. The device of claim 1 , wherein the inorganic semiconductor component comprises a room temperature ion-assisted deposition product of a metal oxide comprising indium.

5. The device of claim 1 , wherein the organic component comprises hydrolyzable moieties.

6. The device of claim 1 , wherein the organic component comprises a dielectric polymer selected from poly(vinylphenol), polystyrene, and copolymers thereof.

7. The device of claim 1 , wherein the organic component comprises a multi-layered composition, the multi-layered composition comprising periodically alternating layers, the periodically alternating layers comprising one or more layers comprising a silyl moiety, and one or more layers comprising a π-polarizable moiety.

8. The device of claim 7 , wherein at least some of the periodically alternating layers are coupled to an adjacent layer by a coupling layer comprising a siloxane matrix.

9. The device of claim 1 , wherein the inorganic-organic hybrid thin film composition is coupled to a substantially transparent substrate.

10. The device of claim 1 , wherein the organic component is coupled to a gate substrate, and the inorganic semiconductor component is an n-channel layer coupled to the organic component.

11. The device of claim 1 , wherein the device is a transparent thin film transistor.

12. A thin film transistor device comprising an inorganic-organic hybrid thin film composition, the inorganic-organic hybrid thin film composition comprising an inorganic semiconductor component coupled to an organic component, wherein the organic component comprises a polymeric component, a π-polarizable component, or a combination thereof; and the inorganic semiconductor component is a channel layer and comprises indium in the form of an oxide, a nitride, a phosphide, an arsenide, or a chalcogenide.

13. The device of claim 12 , wherein the inorganic semiconductor component comprises a metal oxide comprising indium and one or more metals independently selected from a Group 12 metal, a Group 13 metal, and a Group 14 metal.

14. The device of claim 12 , wherein the organic component comprises a π-polarizable component that is coupled to at least one of a silyl moiety and a siloxane moiety.

15. The device of claim 14 , wherein the π-polarizable component comprises a non-linear optical chromophore.

16. The device of claim 12 , wherein the inorganic-organic hybrid thin film composition is coupled to a substrate selected from glass, silicon, an indium oxide material, and a flexible plastic material.

17. A thin film transistor device comprising an inorganic-organic hybrid thin film composition, the inorganic-organic hybrid thin film composition comprising an inorganic semiconductor component coupled to an organic component, wherein the organic component comprises a polymeric component, a π-polarizable component, or a combination thereof; and the inorganic semiconductor component is a channel layer and comprises a metal oxide comprising indium.

18. The device of claim 17 , wherein the inorganic semiconductor component comprises a room temperature ion-assisted deposition product of a metal oxide comprising indium.

19. The device of claim 17 , wherein the organic component comprises a polymer blend, the polymer blend comprising a polymeric component and a component comprising hydrolyzable moieties.

20. The device of claim 17 , wherein the organic component comprises a polymer blend, the polymer blend comprising a polymeric component and a component affording substrate sorption, condensation, or intermolecular crosslinking.

Assignments (3)
CONFIRMATORY LICENSE Recorded Dec 22, 2015
From: NORTHWESTERN UNIVERSITY
To: USA AS REPRESENTED BY THE ADMINISTRATOR OF THE NASA
Reel/Frame 037371/0210 →
CONFIRMATORY LICENSE Recorded May 24, 2012
From: NORTHWESTERN UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 028274/0439 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 18, 2012
From: MARKS, TOBIN J.; FACCHETTI, ANTONIO; WANG, LIAN; YOON, MYUNG-HAN; YANG, YU
To: NORTHWESTERN UNIVERSITY
Reel/Frame 027552/0759 →
Continuity (3)
Continuation 11642217 · Dec 20, 2006
Provisional Application 60752159 · Dec 20, 2005
Related Publication 20120261655A1 · Oct 18, 2012