Radiation-sensitive resin composition and compound
A radiation-sensitive resin composition includes a compound, a resin and a radiation-sensitive acid generator. The compound has a structure in which a group represented by a following formula (1) is bound to a nitrogen atom. The resin has an acid-dissociative dissolution-controlling group and has a property such that alkali solubility of the resin increases by an action of an acid. In the formula (1), Y is a monovalent group having 5 to 20 carbon atoms, and “*” represents a bonding hand with the nitrogen atom. In the formula (i), R 1 , R 2 and R 3 each independently represent a linear or branched alkyl group having 1 to 4 carbon atoms or a monovalent alicyclic hydrocarbon group having 4 to 12 carbon atoms, or R 1 and R 2 are linked with each other to form a bivalent alicyclic hydrocarbon group, and “*” represents a bonding hand with the oxygen atom.
1. A radiation-sensitive resin composition comprising:
a compound represented by a following formula (1-1);
a resin having an acid-dissociative dissolution-controlling group and a property such that alkali solubility of the resin increases by an action of an acid; and
a radiation-sensitive acid generator,
wherein, in the formula (1-1), Y is a monovalent group having 5 to 20 carbon atoms and represented by a following formula (i), and R 4 and R 5 taken together represent a monovalent heterocyclic group having 4 to 20 carbon atoms together with the nitrogen atom to which R 4 and R 5 are attached, a part or all of the hydrogen atoms included in the monovalent heterocyclic group being substituted with a hydroxyl group, a carboxyl group, a —COOR group, a —OCOR group or a cyano group, wherein R represents an alkyl group having 1 to 10 carbon atoms,
wherein, in the formula (i),
R 1 and R 2 each independently represent a linear or branched alkyl group having 1 to 4 carbon atoms or a monovalent alicyclic hydrocarbon group having 4 to 12 carbon atoms, or R 1 and R 2 are linked with each other to form a bivalent alicyclic hydrocarbon group having 4 to 12 carbon atoms together with the carbon atom to which R 1 and R 2 are attached,
R 3 represents a linear or branched alkyl group having 1 to 4 carbon atoms or a monovalent alicyclic hydrocarbon group having 4 to 12 carbon atoms, and
“*” represents a bonding hand with the oxygen atom to which Y is bound.
2. The radiation-sensitive resin composition according to claim 1 , wherein Y in the formula (1-1) is a t-amyl group.
3. The radiation-sensitive resin composition according to claim 1 , wherein the resin has a repeating unit represented by a following formula (3),
wherein, in the formula (3),
R represents a hydrogen atom or a methyl group,
R 6 and R 7 each independently represent a linear or branched alkyl group having 1 to 4 carbon atoms or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or R 6 and R 7 are linked with each other to form a bivalent alicyclic hydrocarbon group having 4 to 20 carbon atoms together with the carbon atom to which R 6 and R 7 are attached, and
R 8 represents a linear or branched alkyl group having 1 to 4 carbon atoms or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms.
4. The radiation-sensitive resin composition according to claim 1 , wherein the resin has a repeating unit that includes a lactone skeleton, a cyclic carbonate skeleton or a combination thereof.
5. The radiation-sensitive resin composition according to claim 1 , wherein R 4 and R 5 taken together represent a substituted or unsubstituted pyrrole, a substituted or unsubstituted imidazole, a substituted or unsubstituted pyrazole, a substituted or unsubstituted pyrrolidine, a substituted or unsubstituted piperidine, a substituted or unsubstituted piperazine or a substituted or unsubstituted morpholine together with the nitrogen atom to which R 4 and R 5 are attached.
6. A compound represented by a following formula (I-1), and having a molecular weight of no greater than 3,000,
wherein, in the formula (I-1), R 4 and R 5 taken together represent a monovalent heterocyclic group having 4 to 20 carbon atoms together with the nitrogen atom to which R 4 and R 5 are attached, a part or all of the hydrogen atoms included in the monovalent heterocyclic group being substituted with a hydroxyl group, a carboxyl group, a —COOR group, a —OCOR group or a cyano group, wherein R represents an alkyl group having 1 to 10 carbon atoms.
7. The compound according to claim 6 , wherein R 4 and R 5 taken together represent a substituted or unsubstituted pyrrole, a substituted or unsubstituted imidazole, a substituted or unsubstituted pyrazole, a substituted or unsubstituted pyrrolidine, a substituted or unsubstituted piperidine, a substituted or unsubstituted piperazine or a substituted or unsubstituted morpholine together with the nitrogen atom to which R 4 and R 5 are attached.