Low OHMIC contacts

1. A method of forming a device comprising:

providing a substrate with a contact region;

forming vacancy defects in the substrate, wherein the vacancy defects have a peak concentration at a depth D V ; and

forming a metal based contact in the contact region comprising

forming a metal layer having a thickness T M to form the metal based contact having a depth D C which is equal to D V , and

performing a thermal process to form the metal based contact, wherein the metal based contact has the depth D C which is equal to D V , wherein the vacancy defects lower the resistance of the metal based contact with the substrate.

2. The method of claim 1 wherein forming the vacancy defects in the substrate includes irradiating the substrate with electromagnetic radiation.

3. The method of claim 2 wherein the electromagnetic radiation includes laser.

4. The method of claim 2 wherein irradiating the substrate includes melting a portion of the substrate to form a melted layer.

5. The method of claim 4 wherein the peak concentration of the vacancy defects are formed at a desired maximum melt depth of the melted layer.

6. The method of claim 1 further comprises forming a masking layer having absorptive properties on top of the contact region.

7. The method of claim 1 further comprises implanting dopants of a first polarity type to form a doped contact region having a depth D D in the contact region.

8. The method of claim 7 wherein the depth D D is deeper than the depth D V .

9. The method of claim 7 wherein the depth D D is the same as the depth D V .

10. The method of claim 7 wherein implanting dopants is performed after forming the vacancy defects.

11. The method of claim 10 further comprising performing an anneal to activate the dopants, wherein the dopants are piled up at D V .

12. The method of claim 10 further includes trapping of dopants at the depth D V during formation of the metal based contact.

13. A method of forming a device comprising:

providing a substrate with a contact region having a bottom at a depth D D ;

processing the substrate to form vacancy defects in the substrate in the contact region, the vacancy defects have a peak concentration at a depth D V , wherein the processing is performed to form D V having a desired depth which is below the surface of the substrate to D D ;

implanting dopants of a first polarity type to form a doped contact region having the depth D D in the contact region; and

forming a metal based contact in the contact region, wherein the metal based contact has a depth D C which is equal to D V , wherein the vacancy defects are displaced away from and above the depth D D of the doped contact region, the vacancy defects lower the resistance of the metal based contact with the substrate.

14. A device comprising:

a substrate with a contact region having a bottom at a depth D D ;

vacancy defects in the substrate, wherein the vacancy defects have a peak concentration at a depth D V , wherein D V is at a desired depth which is below the surface of the substrate to D D ; and

a metal based contact in the contact region, wherein the metal based contact has a depth D C which is equal to D V , wherein the vacancy defects lower the resistance of the metal based contact with the substrate.

15. The device of claim 14 further comprises a doped contact region having the depth D D in the contact region.

16. The device of claim 15 wherein the depth D D is deeper than the depth D V .

17. The device of claim 15 wherein the depth D D is the same as the depth D V .

18. The device of claim 14 wherein the vacancy defects include laser induced vacancy defects.

19. The method of claim 7 wherein the substrate comprises a crystalline material and the dopants are piled up at a crystal/metal based contact interface, and the vacancy defects are displaced away and above the depth D D of the doped contact region.