Wafer level chip package and a method of fabricating thereof
View Patent ↗Wafer level chip packages including risers having sloped sidewalls and methods of fabricating such chip packages are disclosed. The inventive wafer level chip packages may advantageously be used in various microelectronic assemblies.
1. A packaged chip comprising:
a semiconductor chip having a front surface, contact pads exposed at said front surface, and posts projecting upwardly from said front surface, said posts having sidewalls;
a first dielectric material disposed on the front surface of the chip and on the sidewalls of the posts so that the first dielectric material and the posts form risers, each riser including a post and having a sloping surface defined by the first dielectric material, the sloping surfaces of each riser as a whole being disposed at a lesser angle to the front surface than the sidewall as a whole of the post included in the riser, said risers having tips;
conductive lines propagating from the contact pads to the tips of the risers and extending over said sloping surfaces of the risers; and
terminals terminating the conductive lines, said terminals being disposed on the tips of the risers.
2. The package of claim 1 wherein elastic moduli of the posts and the first dielectric material are lower than an elastic modulus of the chip.
3. The package of claim 1 further comprising solder balls attached to at least some of the terminals.
4. The package of claim 1 wherein at least some of the terminals comprise contact pins.
5. An assembly including the packaged chip of claim 1 and a circuit panel having contact pads, the terminals of said packaged chip being bonded to the contact pads of the circuit panel.