IP Library Granted Patent US 9,005,365
Granted Patent B2
US 9,005,365 · App. 13/359,434 · Granted Apr 14, 2015

Method and apparatus for depositing LED organic film

Inventors: Vladimir Bulovic (Lexington, MA); Marc A. Baldo (Cambridge, MA); Martin A. Schmidt (Reading, MA); Valerie Gassend (San Carlos, CA); Jianglong Chen (San Jose, CA)
Assignee: Massachusetts Institute of Technology
H01L51/0011C23C16/4481C23C16/45568C23C16/4485C23C16/04C23C16/4483C23C16/45565C23C16/448C23C16/042B05D1/12H01L51/56
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Quick Facts
Patent No.
US 9,005,365
App. No.
13/359,434
Granted
Apr 14, 2015
Kind
B2
Abstract

In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores, the micro-pores providing a conduit for passage of the suspended organic particles; and a nozzle heater for pulsatingly heating the micro-pores nozzle to discharge the suspended organic particles from the discharge nozzle.

Claims (18)

1. An apparatus for depositing one or more organic materials onto a substrate, comprising:

a source to receive a quantity of organic particles containing solvent, the source configured to remove solvent from the quantity of organic particles to provide a quantity of substantially solvent-free organic particles;

a discharge nozzle having a plurality of openings to receive the quantity of substantially solvent-free organic particles and to discharge the quantity of substantially solvent-free organic particles from the discharge nozzle onto the substrate;

a thermal source associated with the discharge nozzle, the thermal source configured to receive the quantity of substantially solvent-free organic particles from the source and to deliver at least a portion of the quantity of substantially solvent-free organic particles to the discharge nozzle; and

a housing to integrate the source and the discharge nozzle, the housing defining a flow path between the source and the discharge nozzle.

2. The apparatus of claim 1 , wherein the source further comprises an evaporation source.

3. The apparatus of claim 1 , further comprising a vacuum source to enable the apparatus to operate at a relative vacuum.

4. An apparatus for depositing one or more organic materials onto a substrate, comprising:

a first member having a plurality of columnar conduits;

a second member having a plurality of openings corresponding to the plurality of columnar conduits;

a source to receive a quantity of organic particles containing solvent;

a heater to remove the solvent from the quantity of organic particles to form a quantity of substantially solvent-free organic particles;

a thermal source associated with one of the first or the second member, the thermal source configured to receive the quantity of substantially solvent-free organic particles and to deposit at least a portion of the quantity of substantially solvent-free organic particles on the substrate; and

a housing to integrate the source and the columnar conduits, the housing defining a flow path between the source and the columnar conduits.

5. The apparatus of claim 4 , further comprising a vacuum source to enable the apparatus to operate in a relative vacuum.

6. The apparatus of claim 4 , wherein the plurality of columnar conduits further comprise a plurality of micro-pores.

7. The apparatus of claim 4 , wherein the second substantially planar member further comprises a mask.

8. The apparatus of claim 4 , further comprising a transport gas for delivering the quantity of substantially-solvent free organic particles through the flow path to the first member.

Assignments (1)
CONFIRMATORY LICENSE Recorded May 8, 2015
From: MASSACHUSETTS INSITUTE OF TECHNOLOGY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 035627/0167 →
Continuity (3)
Continuation 11282472 · Nov 21, 2005
Provisional Application 60629312 · Nov 19, 2004
Related Publication 20120148743A1 · Jun 14, 2012