Light emitting diode and method of fabricating the same
View Patent ↗Disclosed herein is a light emitting diode. The light emitting diode includes a support substrate, semiconductor layers formed on the support substrate, and a metal pattern located between the support substrate and the lower semiconductor layer. The semiconductor layers include an upper semiconductor layer of a first conductive type, an active layer, and a lower semiconductor layer of a second conductive type. The semiconductor layers are grown on a sacrificial substrate and the support substrate is homogeneous with the sacrificial substrate.
1. A method of fabricating a light emitting diode, the method comprising:
forming semiconductor layers on a first substrate, the semiconductor layers comprising a buffer layer, a first conductive type semiconductor layer, an active layer, and a second conductive type semiconductor layer;
forming a metal pattern on the second conductive type semiconductor layer;
forming a bonding metal layer on a second substrate;
bonding the metal pattern and the bonding metal layer;
separating the first substrate from the semiconductor layers;
patterning the semiconductor layers, the metal pattern, and the bonding metal layer to form separated metal patterns and light emitting cells arranged on at least one region of the respective separated metal patterns; and
dicing the second substrate to form individual light emitting diode chips,
wherein the second substrate is homogeneous with the first substrate, and
wherein the separating of the first substrate from the semiconductor layers comprises irradiating light onto a side of the first substrate to decompose the buffer layer formed on an opposite side of the first substrate.
2. The method of claim 1 , wherein the first substrate and the second substrate comprise sapphire.
3. The method of claim 1 , wherein forming the metal pattern comprises:
forming a plurality of reflective metal layers separated from each other on the second conductive type semiconductor layer; and
forming an intermediate metal layer covering the second conductive type semiconductor layer and the reflective metal layers.
4. The method of claim 1 , further comprising:
forming a plurality of grooves or through-holes in an upper portion or a lower portion of the second substrate, and
forming metal layers in the grooves or the through-holes, before forming the bonding metal layer on the second substrate.
5. A method of fabricating a light emitting diode, the method comprising:
forming semiconductor layers on a first substrate, the semiconductor layers comprising a buffer layer, a first conductive type semiconductor layer, an active layer, and a second type conductive semiconductor layer;
forming a metal pattern on the second conductive type semiconductor layer;
forming a bonding metal layer on a second substrate;
bonding the metal pattern and the bonding metal layer;
separating the first substrate from the semiconductor layers;
patterning the semiconductor layers, the metal pattern, and the bonding metal layer to form separated metal patterns and light emitting cells arranged on at least one region of the respective separated metal patterns; and
forming a metal wire to electrically connect an upper surface of a first light emitting cell to the metal pattern adjacent to and spaced apart from the upper surface thereof,
wherein the second substrate is homogeneous with the first substrate, and
wherein the separating of the first substrate from the semiconductor layers comprises irradiating light onto a side of the first substrate to decompose the buffer layer formed an opposite side of the first substrate.
6. The method of claim 5 , wherein the first substrate and the second substrate comprise sapphire.
7. The method of claim 5 , wherein forming the metal pattern comprises:
forming a plurality of reflective metal layers separated from each other on the second conductive semiconductor layer; and
forming an intermediate metal layer covering the second conductive semiconductor layer and the reflective metal layers.