Charged particle radiation device
View Patent ↗Disclosed is a high resolution and high throughput charged particle radiation device that attenuates the natural vibration of an ion pump in a short time, excited by a reaction force at the time of driving the stage, and prevents occurrence of a loop of force and a loop of current. The charged particle radiation device includes a sample chamber ( 4 ) for disposing a sample ( 3 ) therein, a charged particle radiation optical lens tube ( 1 ) for irradiating the sample ( 3 ) with charged particle radiation ( 10 ), ion pumps ( 2 a, 2 b ) for evacuating the charged particle radiation optical lens tube ( 1 ), a frame ( 16 ) fixedly attached to the sample chamber ( 4 ), the frame ( 16 ) facing one end of each of the ion pumps ( 2 a , 2 b ), and vibration absorbers provided between the frame ( 16 ) and the one end of each of the ion pumps ( 2 a, 2 b ), each of the vibration absorbers including a layered structure which includes a viscoelastic sheet ( 20 a, 20 b ) sandwiched between metal plates ( 18 a , 18 b, 21 a, 21 b ).
1. A charged particle radiation device comprising:
a sample chamber configured for disposing a sample therein;
a charged particle radiation optical lens tube configured to irradiate the sample with charged particle radiation;
an ion pump having an outer surface and configured to evacuate an interior of the charged particle radiation optical lens tube;
a frame fixedly attached to a constituent member of the sample chamber, the frame facing a fitting face of the outer surface of the ion pump; and
a vibration absorber provided outside the outer surface of the ion pump between the frame and the fitting face of the outer surface of the ion pump, the vibration absorber configured to be removable from the outer surface of the ion pump and comprising a layered structure which includes a viscoelastic sheet sandwiched between metal plates.
2. The charged particle radiation device according to claim 1 , comprising a plurality of ion pumps each having an outer surface,
wherein the frame is split into plural frames, the number of the split frames corresponding with the number of the ion pumps,
each of the split frames is fixedly attached to a constituent member of the sample chamber or to another frame, and
the layered structure is provided between each of the split frames and each of the ion pumps outside the outer surfaces of the ion pumps.
3. The charged particle radiation device according to claim 1 ,
wherein the vibration absorber is disposed in only one plane of the ion pump.
4. The charged particle radiation device according to claim 3 ,
wherein the fitting face of the outer surface of the ion pump is on a side of the ion pump opposite to a side of the ion pump that faces the charged particle radiation optical lens tube.
5. A charged particle radiation device comprising:
a sample chamber configured for disposing a sample therein;
a load plate configured to support the sample chamber;
a charged particle radiation optical lens tube configured to irradiate the sample with charged particle radiation;
an ion pump having an outer surface and configured to evacuate an interior of the charged particle radiation optical lens tube;
a frame fixedly attached to the load plate, the frame facing a fitting face of the outer surface of the ion pump; and
a vibration absorber provided outside the outer surface of the ion pump between the frame and the fitting face of the outer surface of the ion pump, the vibration absorber configured to be removable from the outer surface of the ion pump and comprising a layered structure which includes a viscoelastic sheet sandwiched between metal plates.
6. The charged particle radiation device according to claim 5 , comprising a plurality of ion pumps each having an outer surface,
wherein the frame is split into plural frames, the number of the split frames corresponding with the number of the ion pumps,
each of the split frames is fixedly attached to the load plate or to another frame, and
the layered structure is provided between each of the split frames and each of the ion pumps outside the outer surfaces of the ion pumps.