Semiconductor device and manufacturing method thereof
View Patent ↗The invention discloses a novel MOSFET device fabricated by a gate last process and its implementation method, the device comprising: a substrate; a gate stack structure located on a channel region in the substrate, on either side of which is eliminated the conventional isolation spacer; an epitaxially grown ultrathin metal silicide constituting a source/drain region. Wherein the device eliminates the high resistance region below the conventional isolation spacer; a dopant segregation region with imlanted ions is formed between the source/drain and the channel region, which decreases the Schottky barrier height between the metal silicide source/drain and the channel. At the same time, the epitaxially grown metal silicide can withstand a second high-temperature annealing used for improving the performance of a high-k gate dielectric material, which further improves the performance of the device. The MOSFET according to the invention reduces the parasitic resistance and capacitance greatly and thereby decreases the RC delay, thus improving the switching performance of the MOSFET device significantly.
1. A manufacturing method for fabricating a semiconductor device by a gate last process, comprising:
forming a dummy gate structure on a substrate;
depositing a metal layer covering the substrate and the dummy gate structure;
performing a first annealing to cause the metal layer on opposite sides of the dummy gate structure to react with the substrate to form epitaxially grown metal silicide;
stripping off the un-reacted metal layer, then the epitaxially grown metal silicide forming source/drain regions of the device, the substrate below the dummy gate structure forming a channel region, and the source/drain regions being in direct contact with the channel region;
implanting ions into the epitaxially grown metal silicide source/drain regions;
forming an interlayer dielectric layer on the epitaxially grown metal silicide and around the dummy gate structure;
removing the dummy gate structure;
depositing a high-k gate dielectric material in a gate trench in the interlayer dielectric layer formed after removing the dummy gate structure;
performing a second annealing, forming a dopant segregation region with implanted ions at the interface between the epitaxially grown metal silicide source/drain region and the channel region; and
depositing a metal gate material on the high-k gate dielectric material, the metal gate material and the high-k gate dielectric material constituting a gate stack structure,
wherein the formation of an isolation spacer on either side of the dummy gate is avoided before the metal layer is deposited; and the semiconductor device has no isolation spacer on either side of the gate stack structure.
2. The manufacturing method for fabricating a semiconductor device as claimed in claim 1 , wherein the epitaxially grown metal silicide is NiSi2-y, Ni1-xPtxSi2-y, CoSi2-y or Ni1-xCoxSi2-y, wherein 0<x<1, and 0 y<1.
3. The manufacturing method for fabricating a semiconductor device as claimed in claim 1 , wherein for a p-type metal silicide source/drain MOSFET, the implanted ion is any one or combination of boron, aluminum, gallium, indium, and for an n-type metal silicide source/drain MOSFET, the implanted ion is any one or combination of nitrogen, phosphor, arsenic, oxygen, sulfur, selenium, tellurium, fluorine, chlorine.
4. The manufacturing method for fabricating a semiconductor device as claimed in claim 1 , wherein the temperature of the first annealing and/or the second annealing is 500 to 850° C.
5. The manufacturing method for producing a semiconductor device as claimed in claim 1 , wherein the implantation dosage for implanted ions is 1×1014 cm−2 to 1×1016 cm−2.
6. The manufacturing method for fabricating a semiconductor device as claimed in claim 1 , wherein the thickness of the deposited metal layer is less than or equal to 5 nm.
7. The manufacturing method for fabricating a semiconductor device as claimed in claim 1 , wherein the material of the deposited metal layer comprises cobalt, nickel, nickel-platinum alloy, nickel-cobalt alloy or ternary alloy of nickel, platinum and cobalt.
8. The manufacturing method for fabricating a semiconductor device as claimed in claim 1 , wherein the dummy gate structure is constituted by oxide.
9. The manufacturing method for fabricating a semiconductor device as claimed in claim 1 , further comprising: after depositing the metal gate material, forming a metal contact structure in the interlayer dielectric layer, the metal contact structure being electrically connected to the epitaxially grown metal silicide.
10. The manufacturing method for fabricating a semiconductor device as claimed in claim 1 , wherein the hydrofluoric acid wet etching is used for removing the dummy gate structure.
11. The manufacturing method for fabricating a semiconductor device as claimed in claim 1 , wherein the substrate is a bulk silicon substrate or SOI substrate.
12. The manufacturing method for fabricating a semiconductor device as claimed in claim 8 , wherein the oxide is silicon dioxide.
13. The manufacturing method for fabricating a semiconductor device as claimed in claim 9 , wherein the metal contact structure comprises a contact hole buried layer and a filling metal layer.