Thin-film solar battery and method for manufacturing the same

1. A thin-film solar battery comprising:

a translucent insulating substrate;

a first transparent conductive film formed of a crystalline transparent conductive film on the translucent insulating substrate and having an uneven structure on a surface thereof, said first transparent conductive film having a plurality of convex portions;

a second transparent conductive film formed of a transparent conductive film on the first transparent conductive film and having an uneven structure on a surface thereof, where the uneven structure is rounder than the uneven structure of the first transparent conductive film;

a power generation layer formed on the second transparent conductive film and having at least one crystalline layer to generate power; and

a backside electrode layer formed of a light-reflective conductive film on the power generation layer, wherein

a substantially convex hollow portion projecting from the translucent insulating substrate toward the power generation layer is provided between adjacent convex portions in the uneven structure of the first transparent conductive film,

the substantially convex hollow portion is covered by the second transparent conductive film and

the height of the substantially convex hollow portion is less than the height of each convex portion of the first transparent conductive film.

2. The thin-film solar battery according to claim 1 , wherein the convex hollow portion is formed by being surrounded by a surface of the translucent insulating substrate and the second transparent conductive film, with a bottom face thereof being formed by the surface of the translucent insulating substrate.

3. The thin-film solar battery according to claim 1 , wherein the convex portion of the first transparent conductive film has an overhanging shape.

4. The thin-film solar battery according to claim 1 , wherein the substantially convex hollow portion comprises a plurality of spaced apart substantially convex hollow portions.

5. The thin-film solar battery according to claim 1 , wherein the power generation layer has a p-n junction or a pin junction, and is formed by laminating at least a first power generation layer and a second power generation layer, each including a thin-film semiconductor layer that generates power by incident light.

6. The thin-film solar battery according to claim 5 , wherein an intermediate layer having optical transparency, light reflectivity, and electrical conductivity, is formed of a transparent conductive film between the first power generation layer and the second power generation layer.

7. The thin-film solar battery according to claim 1 , wherein a transparent conductive film is inserted between the power generation layer and the backside electrode layer.

8. The thin-film solar battery according to claim 1 , wherein the first transparent conductive film comprises a crystallized zinc oxide and at least one element selected from the group consisting of Al, Ga, In, B, Y, Si, Zr, and Ti as a dopant thereof.

9. The thin-film solar battery according to claim 1 , wherein the second transparent conductive film comprises tin oxide and at least element selected from the group consisting of Al, Ga, In, B, Y, Si, Zr, Ti, and F as a dopant thereof.

10. A thin-film solar battery comprising:

a translucent insulating substrate;

a first transparent conductive film formed of a crystalline transparent conductive film on the translucent insulating substrate and having an uneven structure on a surface thereof, said first transparent conductive film having a plurality of convex portions;

a second transparent conductive film formed of a transparent conductive film on the first transparent conductive film and having an uneven structure on a surface thereof, where the uneven structure is rounder than the uneven structure of the first transparent conductive film;

a power generation layer formed on the second transparent conductive film and having at least one crystalline layer to generate power; and

a backside electrode layer formed of a light-reflective conductive film on the power generation layer, wherein

a substantially convex hollow portion projecting from the translucent insulating substrate toward the power generation layer is provided between and confined to adjacent convex portions in the uneven structure of the first transparent conductive film and

the height of the substantially convex hollow portion is less than the height of each convex portion of the first transparent conductive film.

11. A thin-film solar battery comprising:

a translucent insulating substrate;

a first transparent conductive film formed of a crystalline transparent conductive film on the translucent insulating substrate and having an uneven structure on a surface thereof, said first transparent conductive film having a plurality of first convex portions;

a second transparent conductive film formed of a transparent conductive film on the first transparent conductive film and having an uneven structure on a surface thereof, the second transparent conductive film having a plurality of second convex portions, where the second convex portions are rounder, larger in shape, and lesser in numbers than the first convex portions of the first transparent conductive film;

a power generation layer formed on the second transparent conductive film and having at least one crystalline layer to generate power; and

a backside electrode layer formed of a light-reflective conductive film on the power generation layer, wherein

a substantially convex hollow portion projecting from the translucent insulating substrate toward the power generation layer is provided between and confined to adjacent convex portions in the uneven structure of the first transparent conductive film and

the height of the substantially convex hollow portion is less than the height of each convex portion of the first transparent conductive film.