Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth. The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.
1. An ion microscope, comprising:
a field ionization ion source which has an emitter tip having a needle-shaped end, an ionizing chamber in which the emitter tip is arranged, a pipe for supplying gas molecules to the vicinity of the end of the emitter tip, and an extraction electrode for generating an electric field to ionize the gas molecules in the vicinity of the emitter tip end;
a sample stage on which a sample is placed;
a lens for focusing an ion beam from the gas field ionization ion source onto the sample;
a base for supporting the field ionization ion source, the sample stage and the lens;
an apparatus stand; and
a vibration removal mechanism disposed between the base and the apparatus stand,
the ion microscope, comprising:
a cooling heat conductor thermally connected partly to the field ionization ion source;
a heat exchanger thermally coupled to the cooling heat conductor;
a refrigerator independent of the base;
a two-way pipe for circulating a refrigerant between the heat exchanger and the refrigerator; and
a vacuum insulated pipe which houses at least part of the two-way pipe, wherein:
one end of the vacuum insulated pipe is supported by the base.
2. The ion microscope according to claim 1 , further comprising a first two-way pipe in which a very low temperature refrigerant for cooling the field ionization ion source flows; and
a second two-way pipe which is disposed to thermally shield the first two-way pipe and in which a refrigerant having a temperature higher than that of the very low temperature refrigerant flows.
3. The ion microscope according to claim 1 , wherein the one end of the vacuum insulated pipe supported by the base is provided with a bulkhead through which the cooling heat conductor is disposed, the heat exchanger is arranged within the vacuum insulated pipe, and the heat exchanger is vacuum-isolated from the field ionization ion source.
4. The ion microscope according to claim 3 , wherein the vacuum bulkhead has a honeycomb structure.
5. The ion microscope according to claim 1 , further comprising:
a base mount for supporting the emitter tip, and
a deformable mechanism element for connecting the base mount and the extraction electrode, wherein:
the ionizing chamber is comprised of at least the base mount, the extraction electrode and the deformable mechanism element, and the ionizing chamber is movable.
6. The ion microscope according to claim 1 , wherein the vacuum insulated pipe is divided into at least two, one of the vacuum insulated pipes is supported by the base, the other is supported by the apparatus stand, and the divided vacuum insulated pipes are vacuum-connected with a bellows.
7. The ion microscope according to claim 1 , wherein the vacuum insulated pipe is provided with a liquid nitrogen circuit to cool the inside of the vacuum insulated pipe.
8. The ion microscope according to claim 7 , wherein the liquid nitrogen circuit and the two-way pipe are thermally integrated with each other within the vacuum insulation container.
9. The ion microscope according to claim 1 , wherein the one end of the vacuum insulated pipe supported by the base is provided with the bulkhead through which the two-way pipe is disposed, and the vacuum insulated pipe interior is vacuum-isolated from the field ionization ion source.
10. The ion microscope according to claim 1 , including an operation mode to circulate a refrigerant in the two-way pipe when a vacuum container including the field ionization ion source, the sample stage and the lens is baked.