Capactive pressure sensor incorporating a temperature measurement and compatible with hot environments

1. A capacitive measurement device comprising first measurement means designed to carry out at least one of a first measurement and a detection function in relation to an object placed near said first measurement means comprising:

a body of an electrically conductive material, a capacity electrode of an electrically conductive material, and a guard electrode placed between the body and the capacitive electrode and electrically insulated from the body on the one hand and from the capacitive electrode on the other hand by dielectric elements;

excitation means which maintain the capacitive electrode and the guard electrode to an identical AC electrical potential;

first electronic means connected to the capacitive and guard electrodes for measuring the capacitance between said capacitive electrode and said object; and

second measurement means designed to carry out a second measurement function, which are placed within said body and in the vicinity of either the capacitive or guard electrode, and maintained by the excitation means to a AC electrical potential identical to that of the guard electrode.

2. The device according to claim 1 , further comprising a triaxial structure cable including a center conductor connected to the capacitive electrode, a guard shielding connected to the guard electrode and a ground shielding connected to the body,

wherein the second measurement means comprise at least one further conductor inserted in the triaxial cable, and connecting the further sensor to second electronic means coupled to said second measurement means.

3. The device according to claim 1 , wherein the first and second electronic means are at least in part floating and referenced to the potential of the guard, the excitation means being integrated in the floating part of at least one of said first and second electronic means.

4. The device according to claim 1 , wherein the excitation means comprise a transformer the primary circuit of which is excited by a AC voltage source, and the secondary circuit of which comprises a winding consisting of a shielded cable, said cable comprising:

a guard shielding connected on one side of the transformer to the guard electrode of the sensor, and on the other side, to the ground of the first and second electronic means,

conductors connected to the capacitive electrode and the further sensor on one side of the transformer, and to the first and second electronic means on the other side.

5. The device according to claim 1 , further comprising a membrane of an electrically conductive material, which membrane:

is fastened to the body so as to be parallel to the surface of the capacitive electrode, and to be deformable under the effect of a pressure difference applied on either face thereof,

is capacitively coupled to the capacitive electrode which measures the deformation thereof.

6. The device according to claim 5 , wherein the membrane comprises a material selected so that the expansion coefficient of said membrane is identical to the expansion coefficient of the device.

7. The device according to claim 1 , wherein the further sensor comprises a temperature sensor.

8. The device according to claim 7 , wherein the temperature sensor comprises a thermocouple.

9. The device according to claim 8 , wherein:

the thermocouple is welded to the capacitive electrode, and

the triaxial cable comprises two centre conductors connected to both wires of the thermocouple, one of said conductors being simultaneously connected to the first and second electronic means, the other conductor being only connected to the second electronic means.

10. The device according to claim 8 , wherein the triaxial cable comprises three centre conductors, one of which being connected to the capacitive electrode and the two other ones being connected to both wires of the thermocouple.

11. The device according to claim 10 , wherein the thermocouple is welded to the guard electrode.

12. A pressure sensor integrating a device according to claim 5 .

13. A pressure measurement method implementing a device according to claim 1 , comprising:

measuring the deformation of a membrane under the effect of a pressure difference applied on either side of said membrane, which deformation is measured by means of a capacitive sensor comprising a capacitive electrode and a guard electrode substantially excited at the same AC electric potential,

measuring a temperature by means of a temperature sensor provided in the vicinity of the capacitive measurement electrode, which temperature sensor is substantially excited at the same AC electric potential as the guard electrode and the capacitive electrode,

calculating a pressure based on a transfer function determined beforehand, relating the measure of the capacitive sensor to the pressure difference applied, and

the transfer function is adjusted depending on the measured temperature.

14. The method according to claim 13 , wherein the transfer function includes an elastic deformation pattern of the membrane, and

in that the values of at least one of the expansion coefficient and Young modulus of the membrane are selected depending on the measured temperature.

15. The method according to claim 13 , wherein the transfer function includes a plurality of calibration curves set for determined temperature ranges, and in that the curve applied is selected depending on the measured temperature.