Microwave antenna for generating plasma
The present invention relates to the new structure antenna to create the uniform large area plasma using microwave. The microwave antenna to create the plasma of present invention comprises the waveguide, main body of antenna and the coaxial structure connecting part which connects said waveguide and said main body of antenna electrically, the main body of antenna comprises the conductive block in donut shape forming multiple slots, and notches are formed between the multiple slots of the conductive block and multiple permanent magnets are inserted into the notches. The multiple slots can be formed by passing through the inside and outside of the conductive block and the multiple slots can be formed with repetitive square wave pattern.
1. A microwave antenna for creating the plasma comprising a waveguide, a main body of antenna, a coaxial structure connecting part said waveguide, said main body electrically;
wherein said main body of antenna comprising a donut shaped conductive block formed with multiple slots, notches are formed between the multiple slots of the conductive block, multiple permanent magnets are inserted into the notches.
2. The microwave antenna to create the plasma according to claim 1 wherein the multiple slots are formed by passing through internal and external part of the conductive blocks.
3. The microwave antenna to create the plasma according to claim 2 wherein the multiple slots are formed with repetitive square wave pattern.
4. The microwave antenna to create the plasma according to claim 2 wherein said multiple permanent magnets are inserted into the notches formed between the multiple slots and are aligned its upper side to be N pole and bottom side to be S pole, otherwise its upper side to be S pole and bottom side to be N pole.
5. The microwave antenna to create the plasma according to claim 2 wherein movement of the energetic electrons due to the gradient and curvature of the magnetic field is governed by the following equation,
V
_
d
=
m
e
e
(
V
2
+
1
2
V
i
_
2
)
B
_
×
R
c
_
B
2
R
2
Here, V d is a vector of the drift velocity,
V ∥ is a velocity vector for magnetic field direction,
V ⊥ is a velocity which is perpendicular to the magnetic field,
B i is a magnetic field vector,
R c is a magnetic field curvature vector.
6. The microwave antenna to create the plasma according to claim 2 wherein comprising
an internal conductive block where the coaxial structure connecting part comprising a large diameter coaxial structure;
an external conductive block allocating to the external part of said internal conductive block; and
a ceramic insulation which covers a part of the entire internal conductive block.
7. The microwave antenna to create the plasma according to claim 1 wherein said main body of antenna further comprises a cover to curb the deviation of said permanent magnet to outside.
8. The microwave antenna to create the plasma according to claim 1 wherein the multiple slots are formed with repetitive square wave pattern.
9. The microwave antenna to create the plasma according to claim 8 wherein height direction length of the conductive block and the circumferential direction length of the multiple slots are formed with ½ of the wave decided by the use frequency, the multiple slots are shorted at terminal part.
10. The microwave antenna to create the plasma according to claim 1 wherein said multiple permanent magnets are inserted into the notches formed between the multiple slots and are aligned its upper side to be N pole and bottom side to be S pole, otherwise its upper side to be S pole and bottom side to be N pole.
11. The microwave antenna to create the plasma according to claim 1 wherein the main body of antenna further comprising
a connecting part to the external conductive block and a connecting part to the internal conductive block which connect electrically to the coaxial structure connecting part in the antenna main body.
12. The microwave antenna to create the plasma according to claim 1 wherein movement of the energetic electrons due to the gradient and curvature of the magnetic field is governed by the following equation,
V
_
d
=
m
e
e
(
V
2
+
1
2
V
i
_
2
)
B
_
×
R
c
_
B
2
R
2
Here, V d is a vector of the drift velocity,
V ∥ is a velocity vector for magnetic field direction,
V ⊥ is a velocity which is perpendicular to the magnetic field,
B i is a magnetic field vector,
R c is a magnetic field curvature vector.
13. The microwave antenna to create the plasma according to claim 1 wherein comprising
an internal conductive block where the coaxial structure connecting part comprising a large diameter coaxial structure;
an external conductive block allocating to the external part of said internal conductive block; and
a ceramic insulation which covers a part of the entire internal conductive block.
14. The microwave antenna to create the plasma according to claim 13 wherein further comprising a cooling channel to cool the internal and external conductive block in the coaxial structure connecting part.
15. The microwave antenna to create the plasma according to claim 13 wherein further comprising the antenna main body connecting part in the coaxial structure connecting part.
16. The microwave antenna to create the plasma according to claim 13 wherein the internal conductive block is inserted into the waveguide and power is transmitted by coupling of the microwave inside the waveguide in coaxial structure.