Method of producing barrier film exhibiting excellent gas barrier property, and barrier film
Provided are a barrier film production method and a barrier film comprising at least one organic layer and two or more inorganic layers on a surface of a plastic film, wherein, under an atmosphere of at least 0.3 atmospheric pressure and at most 1.1 atmospheric pressure (1 atmospheric pressure is 1.01325×105 Pa), an organic layer coating liquid is applied on at least one surface of the plastic film, and dried to form the organic layer, thereafter, an inorganic layer coating liquid containing an inorganic compound is applied and dried on the organic layer to laminate at least 2 to 6 inorganic layers, and thereafter, at least two layers of the laminated inorganic layers are subjected to a conversion process.
1. A method of producing a barrier film comprising at least one organic layer and two or more inorganic layers on a surface of a plastic film comprising the steps of:
forming an organic layer of photosensitive resin by applying a photosensitive resin composition comprising an acrylate compound in wet method on at least one surface of the plastic film, under a pressure of 0.3 atmosphere or more but 1.1 atmosphere or less (1 atmosphere being 1.01325×10 5 Pa);
after the forming step, applying an inorganic layer coating liquid comprising a silazane compound on the organic layer, to laminate 2-6 inorganic layers, under a pressure of 0.3 atmosphere or more but 1.1 atmosphere or less; and
carrying out a conversion treatment on at least two layers among the laminated inorganic layers.
2. The method of claim 1 , wherein forming the organic layer and laminating the inorganic layers are carried out under a pressure of 0.8 atmosphere-1.1 atmosphere.
3. The method of claim 1 , wherein the conversion treatment applied to the inorganic layers is a plasma treatment.
4. The method of claim 1 , wherein the conversion treatment applied to the inorganic layers is irradiation of vacuum ultraviolet light.
5. The method of claim 1 , wherein a sum of a number of the organic layer and a number of the inorganic layers is 3 or more but 7 or less.
6. A barrier film produced by the method of claim 1 .
7. The method of claim 1 , wherein the conversion treatment applied to the inorganic layers is irradiation of vacuum ultraviolet light.
8. The method of claim 1 , wherein a bleedout preventing layer is provided on the surface of the plastic film opposite to the surface on which the organic layer is provided.
9. The method of claim 1 , wherein a corona treatment is conducted on the plastic film before providing an organic film or an inorganic film.
10. The method of claim 1 , wherein the barrier film has a layer constitution of:
Organic layer/Inorganic layer/Inorganic layer, formed on the plastic layer.
11. The method of claim 1 , wherein the barrier film has a layer constitution of:
Organic layer/Inorganic layer/Inorganic layer/Inorganic layer, formed on the plastic layer.
12. The method of claim 1 , wherein the barrier film has a layer constitution of:
Organic layer/Inorganic layer//Organic layer/Inorganic layer, formed on the plastic layer.
13. An organic photoelectric conversion element sealed by employing the barrier film of claim 6 .