Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units
A substrate treating apparatus includes a treating block including a plurality of cells arranged one over another. Each cell has treating units for treating substrates and a single main transport mechanism for transporting the substrates to the treating units. Each cell also has a blowout unit for supplying a clean gas into a transporting space of the main transport mechanism and an exhaust unit for exhausting gas from the transporting space. The blowout unit and the exhaust unit are arranged one over the other in the transporting space to separate the transporting space of each cell from that of another cell.
1. A substrate treating apparatus comprising:
a treating block;
the treating block including an upper cell arranged vertically over a lower cell;
each cell having:
treating units for heating substrates; said treating units of the upper cell perform a same series of treatments as the treating units of the lower cell, and
a single main transport mechanism for transporting the substrates to the treating units;
a transporting space extending through the center of each cell, solution treating units are arranged on a first side of the transporting space and heat-treating units are arranged on the second side of the transporting space; the single main transport mechanism is installed in the transporting space;
a blowout unit for supplying a clean gas into the transporting space;
an exhaust unit for exhausting gas from the transporting space;
the blowout unit of each cell being arranged over the transporting space;
the exhaust unit of each cell being arranged under the transporting space, wherein at least one of the blowout units or exhaust units are constructed to block off atmosphere of the transporting space;
wherein the exhaust unit of the upper cell has a lower surface thereof in contact with an upper surface of the blowout unit of the lower cell; and
wherein the exhaust unit of the upper cell and the blowout unit of the lower cell separate an atmosphere in the transporting space of the upper cell and an atmosphere in the transporting space of the lower cell;
the blowout unit of the upper cell and the blowout unit of the lower cell are supplied with said clean gas by a first gas supply pipe extending along the first side of the transporting space.
2. The apparatus of claim 1 , wherein:
the blowout unit has gas supply openings in form of numerous small bores formed on a lower surface thereof; and
the exhaust unit has gas exhaust openings in form of numerous small bores formed on an upper surface thereof.
3. The apparatus of claim 1 , wherein the treating units include:
solution treating units arranged on one side of the transporting space for treating the substrates with solutions;
heat-treating units arranged on the other side of the transporting space for heat-treating the substrates;
the blowout unit is equal in area to the transporting space in plan view;
the exhaust unit is equal in area to the transporting space in plan view; and
the blowout unit and the exhaust unit provided for each cell produce vertical, downward gas currents in the transporting space of each cell to prevent a temperature environment of the solution treating units from being influenced by heat from the heat-treating units.