Integrated circuit device and method for manufacturing same
View Patent ↗An integrated circuit device includes a plurality of fins on an upper surface of a semiconductor substrate and extending in a first direction, a device isolation insulating film placed between the fins, a gate electrode extending in a second direction crossing the first direction on the insulating film; and an insulating film insulating the fin from the gate electrode. In a first region where a plurality of the fins are consecutively arranged, an upper surface of the device isolation insulating film is located at a first position below an upper end of the fin. In a second region located in the second direction as viewed from the first region, the upper surface of the device isolation insulating film is located at a second position above the upper end of the fin. In the second region, the device isolation insulating film covers entirely a side surface of the fin.
1. An integrated circuit device comprising:
a plurality of fins formed on an upper surface of a semiconductor substrate and extending in a first direction;
a wide fin formed on the upper surface of the semiconductor substrate, extending in the first direction, and having a wider width than widths of the fins;
a device isolation insulating film placed between the fins and the wide fin;
a gate electrode extending in a second direction crossing the first direction and provided on the device isolation insulating film;
a first insulating film located between upper surfaces of the fins and the gate electrode; and
a second insulating film located between side surfaces of the fins and the gate electrode,
in a first region where a part of the fins are consecutively arranged, an upper surface of the device isolation insulating film being located at a first position below upper ends of the fins, and in a second region located in the second direction as viewed from the first region, the upper surface of the device isolation insulating film being located at a second position above the upper ends of the fins,
in the second region, an other part of the fins being provided, the device isolation insulating film covering entirely the side surfaces of the other part of the fins, and
the wide fin being placed at a boundary between the first region and the second region.
2. The device according to claim 1 , wherein
a plurality of imaginary lines extending in the first direction, arranged periodically in the second direction, and each located inside the fin or the wide fin can be established, and
each of the fins contains one of the lines, and the wide fin contains two of the lines.
3. The device according to claim 2 , wherein when spaces between the lines are sequentially numbered along the second direction, all the spaces located inside the wide fins are either at least a subset of odd-numbered ones of the spaces or at least a subset of even-numbered ones of the spaces.
4. The device according to claim 1 , further comprising:
an other wide fin formed on the upper surface of the semiconductor substrate, extending in the first direction, and having a wider width than the fins,
wherein
the device is a memory device in which a memory array region and a core region are defined,
the memory array region has the first region and the second region,
the fins are placed inside the memory array region, and
the other wide fin is placed at a boundary between the memory array region and the core region.
5. The device according to claim 4 , wherein in the core region, the fins are not placed, and the upper surface of the device isolation insulating film is located at the second position.
6. The device according to claim 1 , wherein the width of the wide fin is equal to sum of distance between two adjacent ones of the fins and the widths of two of the fins.
7. The device according to claim 1 , wherein electrical film thickness of the first insulating film is thicker than electrical film thickness of the second insulating film.
8. The device according to claim 1 , wherein the device is a magnetoresistive random access memory.
9. An integrated circuit device comprising:
a plurality of fins formed on an upper surface of a semiconductor substrate and extending in a first direction;
a wide fin formed on the upper surface of the semiconductor substrate, extending in the first direction, and having a wider width than widths of the fins;
a device isolation insulating film placed between the fins and the wide fin;
a gate electrode extending in a second direction crossing the first direction and provided on the device isolation insulating film;
a first insulating film located between an upper surfaces of the fins and the gate electrode; and
a second insulating film located between side surfaces of the fins and the gate electrode,
a plurality of imaginary lines extending in the first direction, arranged periodically in the second direction, and each located inside the fin or the wide fin being able to be established, and
each of the fins containing one of the lines, and the wide fin containing two of the lines.