Method of manufacturing a semiconductor device
View Patent ↗A semiconductor device includes groove-like regions that are formed between two adjacent bit lines among a plurality of bit lines each having upper and side surfaces covered with a cap insulating film and a side-wall insulating film, respectively, a SiON film that contains more O (oxygen) than N (nitrogen) and continuously covers inner surfaces of the groove-like regions, and a silicon dioxide film formed by reforming polysilazane and filled in the groove-like regions with the SiON film interposed therebetween.
1. A manufacturing method of a semiconductor device comprising:
forming groove-like regions on each side of adjacent vertical elements;
forming a continuous SiON film that contains more O (oxygen) than N (nitrogen) to continuously cover inner surfaces of the groove-like regions and uppermost surfaces of the adjacent vertical elements extending between adjacent groove-like regions;
filling the groove-like regions with polysilazane with the SiON film interposed therebetween with the polysilazane covering an upper surface of the continuous SiON film covering the uppermost surfaces of the adjacent vertical elements extending between the adjacent groove-like regions; and
forming an insulating film by reforming the polysilazane by heat treatment,
wherein the adjacent vertical elements are adjacent bit lines, and the groove-like regions are regions between the adjacent bit lines.
2. The manufacturing method of a semiconductor device as claimed in claim 1 , wherein a content rate of the N in the SiON film is 10 to 20 atom %.
3. The manufacturing method of a semiconductor device as claimed in claim 1 , wherein a ratio in atom number of the O to the N in the SiON film is 2.2 to 5.5.
4. The manufacturing method of a semiconductor device as claimed in claim 1 , wherein the SiON film is formed by an ALD (Atomic Layer Deposition) method.
5. The manufacturing method of a semiconductor device as claimed in claim 4 , wherein Si corresponding to a four-atomic layer, O corresponding to a three-atomic layer, and N corresponding to a one-atomic layer are deposited in one cycle by the ALD method.
6. The manufacturing method of a semiconductor device as claimed in claim 1 , further comprising performing oxygen plasma processing after forming the SiON film and before filling the groove-like regions.
7. The manufacturing method of a semiconductor device as claimed in claim 6 , further comprising cleaning with water after forming the SiON film and before performing the oxygen plasma processing.
8. The manufacturing method of a semiconductor device as claimed in claim 6 , wherein an aspect ratio in the groove-like regions is in a range of 10 to 15.
9. The manufacturing method of a semiconductor device as claimed in claim 6 , wherein the oxygen-plasma processing is performed at a temperature in a range of 200 to 300° C.
10. The manufacturing method of a semiconductor device as claimed in claim 6 , wherein the oxygen-plasma processing step is performed at a pressure in a range of 0.1 to 10 Torr.
11. The manufacturing method of a semiconductor device as claimed in claim 1 , wherein,
each bit line has an upper surface covered with a cap insulating film and side surfaces covered by a side wall insulating film, and
in said filling step, the polysilazane covers the side wall insulating film, and the uppermost surface of the cap insulating film.
12. The manufacturing method of a semiconductor device as claimed in claim 1 , wherein,
each bit line has an upper surface covered with a cap insulating film and side surfaces covered by a side wall insulating film, and
in said filling step, the polysilazane covers the side wall insulating film, and the uppermost surface of the cap insulating film with the polysilazane contacting the upper surface of the SiON film covering the uppermost surface of the cap insulating film.
13. The manufacturing method of a semiconductor device as claimed in claim 1 , wherein a content rate of the N in the SiON film is 10 to 20 atom % so that said step of forming the insulating film by reforming the polysilazane by heat treatment forms a SiO 2 film as the insulating film, the SiO 2 film being reformed controlling occurrence of voids within the SiO 2 film.
14. A method comprising:
forming over an uneven surface of a target a continuous SiON film that contains more O (oxygen) than N (nitrogen), the SiON film being conformable with the uneven surface of the target to provide uneven surface, wherein the target comprises a plurality of adjacent vertical elements, the uneven surface defining groove-like regions on each side of the adjacent vertical elements, the formed continuous SiON film continuously covering inner surfaces of the groove-like regions and uppermost surfaces of the adjacent vertical elements extending between the adjacent groove-like regions;
spin-coating an insulation solution on the SiON film to substantially planarize the uneven surface by forming a spin-coating filling the groove-like regions and covering an upper surface of the continuous SiON film covering the uppermost surfaces of the adjacent vertical elements extending between the adjacent groove-like regions the adjacent vertical elements extending between the adjacent groove-like regions; and
performing heat treatment to convert the insulation solution into an insulation film,
wherein the adjacent vertical elements are adjacent bit lines, and the groove-like regions are regions between the adjacent bit lines.
15. The method as claimed in claim 14 , wherein the insulation solution comprises polysilazane.
16. The method as claimed in claim 14 , wherein the adjacent vertical elements of the target comprise a plurality of the bit lines formed in substantially parallel to each other over a semiconductor substrate.
17. The method as claimed in claim 14 further comprising, forming a silicon nitride film over the uneven surface as a layer underlying the SiON film.
18. The method of a semiconductor device as claimed in claim 14 , wherein,
each bit line has an upper surface covered with a cap insulating film and side surfaces covered by a side wall insulating film, and
in said filling step, the polysilazane covers the side wall insulating film, and the uppermost surface of the cap insulating film.
19. The method of a semiconductor device as claimed in claim 14 , wherein,
each bit line has an upper surface covered with a cap insulating film and side surfaces covered by a side wall insulating film, and
in said filling step, the polysilazane covers the side wall insulating film, and the uppermost surface of the cap insulating film with the polysilazane contacting the upper surface of the SiON film covering the uppermost surface of the cap insulating film.
20. The method of a semiconductor device as claimed in claim 14 , wherein a content rate of the N in the SiON film is 10 to 20 atom % so that said step of forming the insulating film by reforming the polysilazane by heat treatment forms a SiO 2 film as the insulating film, the SiO 2 film being reformed controlling occurrence of voids within the SiO 2 film.