Radiation-sensitive composition and compound
A radiation-sensitive composition includes a photoacid generator shown by a general formula (0-1a). Each of R 0 individually represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and M + represents a monovalent onium cation. A compound is shown by a general formula (0). R represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and M + represents a monovalent onium cation.
1. A radiation-sensitive composition comprising:
a photoacid generator shown by formula (1),
wherein each of R 1 and R 2 individually represents
(a1) a substituted or unsubstituted linear or branched monovalent hydrocarbon group having 1 to 30 carbon atoms,
(a2) the hydrocarbon group as defined in (a1) which further includes at least one of an ester bond, an amide bond, a urethane bond, and a sulfide bond,
(a3) a substituted or unsubstituted cyclic or cyclic structure-containing monovalent hydrocarbon group having 3 to 30 carbon atoms,
(a4) the hydrocarbon group as defined in (a3) which further includes at least one of an ester bond, an amide bond, a urethane bond, and a sulfide bond,
(a5) a substituted or unsubstituted aryl group having 6 to 30 carbon atoms, or
(a6) a substituted or unsubstituted cyclic organic group having 4 to 30 carbon atoms and optionally having a monovalent heteroatom, and
M + represents a monovalent caution.
2. The radiation-sensitive composition according to claim 1 , wherein the monovalent onium cation represented by M + is a sulfonium cation shown by formula (2) or an iodonium cation shown by formula (3),
wherein each of R 3 , R 4 , and R 5 individually represents a substituted or unsubstituted linear or branched alkyl group having 1 to 10 carbon atoms or a substituted or unsubstituted aryl group having 6 to 18 carbon atoms, or two of R 3 , R 4 , and R 5 bond to each other to form a cyclic structure together with the sulfur atom in formula (2), and the remainder of R 3 , R 4 , and R 5 represents a substituted or unsubstituted linear or branched alkyl group having 1 to 10 carbon atoms or a substituted or unsubstituted aryl group having 6 to 18 carbon atoms,
R 6 —I + —R 7 (3)
wherein each of R 6 and R 7 individually represents a substituted or unsubstituted linear or branched alkyl group having 1 to 10 carbon atoms or a substituted or unsubstituted aryl group having 6 to 18 carbon atoms, or bond to each other to form a cyclic structure with the iodine atom in formula (3).
3. The radiation-sensitive composition according to claim 1 , further comprising a resin which comprises at least one repeating unit among repeating units shown by formulas (b-1) to (b-5),
wherein R 11 represents a hydrogen atom or a methyl group, R 12 represents a linear or branched alkyl group having 1 to 12 carbon atoms or a linear or branched alkoxy group having 1 to 12 carbon atoms, k is an integer from 0 to 3, and 1 is an integer from 0 to 3, wherein k+1≦5 is satisfied,
wherein R 13 represents a hydrogen atom or a methyl group, R 14 represents a linear or branched alkyl group having 1 to 12 carbon atoms or a linear or branched alkoxy group having 1 to 12 carbon atoms, m is an integer from 0 to 3, and n is an integer from 0 to 3, wherein m+n≦5 is satisfied,
wherein R 15 represents a hydrogen atom or a methyl group, R 16 represents a linear or branched alkyl group having 1 to 12 carbon atoms or a linear or branched alkoxy group having 1 to 12 carbon atoms, p is an integer from 0 to 3, and q is an integer from 0 to 3, wherein p+q≦5 is satisfied,
wherein R 17 represents a hydrogen atom or a methyl group, R 18 represents a linear or branched alkyl group having 1 to 12 carbon atoms or a linear or branched alkoxy group having 1 to 12 carbon atoms, r is an integer from 0 to 3, and s is an integer from 0 to 3, where p+q≦5 is satisfied,
wherein R 19 represents a hydrogen atom or a methyl group.
4. The radiation-sensitive composition according to claim 1 , further comprising at least one compound of ethylene glycol monoalkyl ether acetate and propylene glycol monoalkyl ether acetate as a solvent in an amount of 70 to 100 parts by mass based on 100 parts by mass of the solvent in total.
5. A compound shown by formula (1),
wherein each of R 1 and R 2 individually represents
(a1) a substituted or unsubstituted linear or branched monovalent hydrocarbon group having 1 to 30 carbon atoms,
(a2) the hydrocarbon group as defined in (a1) which further includes at least one of an ester bond, an amide bond, a urethane bond, and a sulfide bond,
(a3) a substituted or unsubstituted cyclic or cyclic structure-containing monovalent hydrocarbon group having 3 to 30 carbon atoms,
(a4) the hydrocarbon group as defined in (a3) which further includes at least one of an ester bond, an amide bond, a urethane bond, and a sulfide bond,
(a5) a substituted or unsubstituted aryl group having 6 to 30 carbon atoms, or
(a6) a substituted or unsubstituted cyclic organic group having 4 to 30 carbon atoms and optionally having a monovalent heteroatom, and
M + represents a monovalent onium cation, the monovalent onium cation represented by M + being a sulfonium cation shown by formula (2) or an iodonium cation shown by formula (3),
wherein each of R 3 , R 4 , and R 5 individually represents a substituted or unsubstituted linear or branched alkyl group having 1 to 10 carbon atoms or a substituted or unsubstituted aryl group having 6 to 18 carbon atoms, or two of R 3 , R 4 , and R 5 bond to each other to form a cyclic structure together with the sulfur atom in formula (2), and the remainder of R 3 , R 4 , and R 5 represents a substituted or unsubstituted linear or branched alkyl group having 1 to 10 carbon atoms or a substituted or unsubstituted aryl group having 6 to 18 carbon atoms,
R 6 —I + —R 7 (3)
wherein each of R 6 and R 7 individually represents a substituted or unsubstituted linear or branched alkyl group having 1 to 10 carbon atoms or a substituted or unsubstituted aryl group having 6 to 18 carbon atoms, or bond to each other to form a cyclic structure with the iodine atom in formula (3).
6. The radiation-sensitive composition according to claim 1 , further comprising an acid diffusion controller.
7. The radiation-sensitive composition according to claim 6 , wherein the acid diffusion controller comprises a nitrogen-containing organic compound, a photosensitive basic compound, or both thereof.
8. The radiation-sensitive composition according to claim 1 , further comprising an additional photoacid generator other than the acid generator shown by formula (1).
9. The radiation-sensitive composition according to claim 8 , wherein an amount of the additional photoacid generator is 80 parts by mass or less based on 100 parts by mass of the acid generator shown by formula (1).
10. The radiation-sensitive composition according to claim 8 , wherein an amount of the additional photoacid generator is 50 parts by mass or less based on 100 parts by mass of the acid generator shown by formula (1).