Method for slicing wafers from a workpiece
View Patent ↗A method for slicing wafers from a workpiece includes providing wire guide rolls each having a grooved coating with a specific thickness and providing rings at opposing ends of a first of the coatings of a respective wire guide roll. The rings are fixed exclusively to the first coating. A sawing wire including wire sections disposed in a parallel fashion is tensioned between the wire guide rolls. The wire sections of the sawing wire are moved relative to the workpiece so as to perform a sawing operation. A change in length of the first coating, brought about by a temperature change, is measured by measuring distances between sensors and the rings. The wire guide rolls are cooled in a manner dependent on the measured distances.
1. A method for slicing wafers from a workpiece, the method comprising:
providing wire guide rolls each having a core and a coating with a specific thickness and an axial length, wherein a fixed bearing having an axial length is associated with each of the wire guide rolls;
providing rings at opposing ends of the coating of at least one of the wire guide rolls, the rings being fixed exclusively to the coating;
providing a sawing wire including wire sections disposed in a parallel fashion, the wire sections being tensioned between the wire guide rolls;
moving the wire sections of the sawing wire relative to the workpiece so as to perform a sawing operation;
measuring a change in the axial length of the coating by measuring distances between sensors and the rings, the change in the axial length being brought about by a temperature change;
measuring a change in the axial length of the fixed bearing associated with the at least one of the wire guide rolls; and
cooling the wire guide rolls and the respective associated fixed bearings in a manner independent of one another and dependent on the measured change in the axial lengths of the coating and of the fixed bearing.
2. The method recited in claim 1 , wherein the cooling the wire guide rolls and the respective associated fixed bearings is carried out so as to reduce a difference between the measured distances between the sensors and rings during the sawing operation and the measured distances between the sensors and rings that existed before the sawing operation.
3. The method recited in claim 1 , wherein the cooling the wire guide rolls and the respective associated fixed bearings is carried out such that a thermally governed change in a length of the workpiece is compensated for by a thermally governed change in the axial length of each respective coating of the respective wire guide roll.
4. The method recited in claim 1 , further comprising clamping each respective coating to the core of the respective wire guide roll.