Semiconductor apparatus, electronic device, and method of manufacturing semiconductor apparatus
Disclosed herein is a semiconductor apparatus including: a first semiconductor part including a first wiring; a second semiconductor part which is adhered to the first semiconductor part and which includes a second wiring electrically connected to the first wiring; and a metallic oxide formed by a reaction between oxygen and a metallic material which reacts with oxygen more easily than hydrogen does, the metallic oxide having been diffused into a region which includes a joint interface between the first wiring and the second wiring and the inside of at least one of the first wiring and the second wiring.
1. A semiconductor apparatus comprising:
a first semiconductor part including a first wiring;
a second semiconductor part which is adhered to the first semiconductor part and which includes a second wiring electrically connected to the first wiring; and
a metallic oxide formed by a reaction between oxygen and a metallic material which reacts with oxygen more easily than hydrogen does, the metallic oxide having been diffused into a region which includes a joint interface between the first wiring and the second wiring and the inside of at least one of the first wiring and the second wiring.
2. The semiconductor apparatus according to claim 1 , wherein an energy of formation necessary for formation of the metallic oxide through the reaction between the metallic material and the oxygen is lower than an energy of formation necessary for formation of water through a reaction between the hydrogen and the oxygen.
3. The semiconductor apparatus according to claim 2 , wherein the metallic material is at least one metallic material selected from the group including Fe, Mn, V, Cr, Mg, Si, Ce, Ti and Al.
4. The semiconductor apparatus according to claim 1 , wherein the first wiring and the second wiring are each a Cu wiring.
5. The semiconductor apparatus according to claim 1 , further comprising
an oxygen gettering layer which is formed in contact with at least one of the first wiring and the second wiring and which contains the metallic material.
6. The semiconductor apparatus according to claim 5 , wherein the oxygen gettering layer is provided at the joint interface between the first wiring and the second wiring.
7. An electronic device comprising:
a first wiring part including a first wiring;
a second wiring part which is in a state of being adhered to the first wiring part and which includes a second wiring electrically connected to the first wiring; and
a metallic oxide formed by a reaction between oxygen and a metallic material which reacts with oxygen more easily than hydrogen does, the metallic oxide having been diffused into a region which includes a joint interface between the first wiring and the second wiring and the inside of at least one of the first wiring and the second wiring.
8. A method of manufacturing a semiconductor apparatus which has a first semiconductor part including a first wiring and a second semiconductor part including a second wiring, the method comprising:
diffusing a metallic material which reacts with oxygen more easily than hydrogen does, into the inside of at least one of the first wiring and the second wiring;
adhering the first semiconductor part and the second semiconductor part to each other so that the first wiring and the second wiring are electrically connected to each other; and
heating the first semiconductor part and the second semiconductor part, in the adhered state, so as to cause the metallic material and the oxygen to react with each other.