Methods of forming germanium-antimony-tellurium materials and methods of forming a semiconductor device structure including the same

1. A method of forming a germanium-antimony-tellurium material, comprising:

exposing a substrate to a reactive germanium precursor and a co-reactive germanium precursor, the reactive germanium precursor and the co-reactive germanium precursor each having at least one ligand coordinated to a germanium atom, wherein the at least one ligand of the co-reactive germanium precursor is different from the at least one ligand of the reactive germanium precursor;

exposing the substrate to a reactive antimony precursor and a co-reactive antimony precursor, the reactive antimony precursor and the co-reactive antimony precursor each having at least one ligand coordinated to an antimony atom, wherein the at least one ligand of the co-reactive antimony precursor is different from the at least one ligand of the reactive antimony precursor;

exposing the substrate to a reactive tellurium precursor and a co-reactive tellurium precursor, the reactive tellurium precursor and the co-reactive tellurium precursor each having at least one ligand coordinated to a tellurium atom, wherein the at least one ligand of the co-reactive tellurium precursor is different from the at least one ligand of the reactive tellurium precursor; and

repeating the exposing the substrate to a reactive germanium precursor and a co-reactive germanium precursor, the exposing the substrate to a reactive antimony precursor and a co-reactive antimony precursor, and the exposing the substrate to a reactive tellurium precursor and a co-reactive tellurium precursor to form a germanium-antimony-tellurium material.

2. The method of claim 1 , wherein exposing a substrate to a reactive germanium precursor and a co-reactive germanium precursor comprises exposing the substrate to a co-reactive germanium precursor comprising a germanium silyl compound.

3. The method of claim 2 , wherein exposing a substrate to a reactive germanium precursor and a co-reactive germanium precursor comprises exposing the substrate to a co-reactive germanium precursor comprising a material selected from the group consisting of Ge(II)(trimethylsilyl) 2 , Ge(IV)(trimethylsilyl) 4 , and GeH(trimethylsilyl) 3 .

4. The method of claim 1 , wherein exposing a substrate to a reactive germanium precursor and a co-reactive germanium precursor comprises exposing the substrate to a reactive germanium precursor comprising a germanium halide compound or a germanium alkoxide compound.

5. The method of claim 4 , wherein exposing the substrate to a reactive germanium precursor comprising a germanium halide compound or a germanium alkoxide compound comprises exposing the substrate to a reactive germanium precursor comprising a material selected from the group consisting of Ge(II)F 2 , Ge(IV)F 4 , Ge(II)Cl 2 , Ge(IV)Cl 4 , Ge(II)Br 2 , Ge(IV)Br 4 , Ge(II)I 2 , Ge(IV)I 4 , Ge(IV)(OMe) 4 , and Ge(IV)(OEt) 4 .

6. The method of claim 1 , wherein exposing a substrate to a reactive germanium precursor and a co-reactive germanium precursor comprises exposing the substrate to an ALD layer cycle consisting essentially of the reactive germanium precursor, the co-reactive germanium precursor, a carrier gas, and a purge gas.

7. The method of claim 1 , wherein exposing the substrate to a reactive antimony precursor and a co-reactive antimony precursor comprises exposing the substrate to a co-reactive antimony precursor comprising an antimony silyl compound.

8. The method of claim 7 , wherein exposing the substrate to a co-reactive antimony precursor comprising an antimony silyl compound comprises exposing the substrate to Sb(III)(trimethylsilyl) 3 .

9. The method of claim 1 , wherein exposing the substrate to a reactive antimony precursor and a co-reactive antimony precursor comprises exposing the substrate to a reactive antimony precursor comprising an antimony halide compound or an antimony alkoxide compound.

10. The method of claim 9 , wherein exposing the substrate to a reactive antimony precursor comprising an antimony halide compound or an antimony alkoxide compound comprises exposing the substrate to a reactive antimony precursor selected from the group consisting of Sb(V)F 5 , Sb(III)F 3 , Sb(III)Cl 3 , Sb(V)Cl 5 , Sb(III)I 3 , Sb(III)Br 3 , Sb(III)(OMe) 3 , and Sb(III)(OEt) 3 .

11. The method of claim 1 , wherein exposing the substrate to a reactive antimony precursor and a co-reactive antimony precursor comprises exposing the substrate to an ALD layer cycle consisting essentially of the reactive antimony precursor, the co-reactive antimony precursor, a carrier gas, and a purge gas.

12. The method of claim 1 , wherein exposing the substrate to a reactive tellurium precursor and a co-reactive tellurium precursor comprises exposing the substrate to a co-reactive tellurium precursor comprising a tellurium silyl compound.

13. The method of claim 12 , wherein exposing the substrate to a co-reactive tellurium precursor comprising a tellurium silyl compound comprises exposing the substrate to a co-reactive tellurium precursor selected from the group consisting of Te(II)(trimethylsilyl) 2 and Te(IV)(trimethylsilyl) 4 .

14. The method of claim 1 , wherein exposing the substrate to a reactive tellurium precursor and a co-reactive tellurium precursor comprises exposing the substrate to a reactive tellurium precursor comprising a tellurium halide compound or a tellurium alkoxide compound.

15. The method of claim 14 , wherein exposing the substrate to a reactive tellurium precursor comprising a tellurium halide compound or a tellurium alkoxide compound comprises exposing the substrate to a reactive tellurium precursor selected from the group consisting of TeCl 4 , TeBr 4 , TeI 4 , Te(IV)(OMe) 4 , and Te(IV)(OEt) 4 .

16. The method of claim 1 , wherein exposing the substrate to a reactive tellurium precursor and a co-reactive tellurium precursor comprises exposing the substrate to an ALD layer cycle consisting essentially of the reactive tellurium precursor, the co-reactive tellurium precursor, a carrier gas, and a purge gas.

17. The method of claim 1 , further comprising conformally forming the germanium-antimony-tellurium material in a plurality of openings in the substrate.

18. The method of claim 1 , further comprising forming a germanium-antimony-tellurium material off the Ge—Te and Sb 2 Te 3 tie line.

19. A method of forming a semiconductor device structure, comprising:

forming a plurality of openings in a substrate, the plurality of openings having a width of less than approximately 100 nm; and

forming a germanium-antimony-tellurium material by atomic layer deposition (ALD) in the plurality of openings, wherein forming the germanium-antimony-tellurium material by ALD comprises:

conducting an ALD layer cycle of germanium, the ALD layer cycle comprising GeH(IV)(trimethylsilyl) 4 and Ge(II)Cl 2 ;

conducting an ALD layer cycle of antimony, the ALD layer cycle comprising Sb(III)(trimethylsilyl) 3 and Sb(III)(OEt) 3 ;

conducting an ALD layer cycle of tellurium, the ALD layer cycle comprising Te(II)(trimethylsilyl) 2 and at least one of Te(OEt) 4 and Te(OMe) 4 , and

repeating the ALD layer cycle of the germanium, the ALD layer cycle of the antimony, and the ALD layer cycle of the tellurium to form a germanium-antimony-tellurium material.

20. The method of claim 19 , wherein forming a germanium-antimony-tellurium material by atomic layer deposition (ALD) in the plurality of openings comprises conformally depositing the germanium-antimony-tellurium material in the plurality of openings.

21. A method of forming a germanium-antimony-tellurium material, comprising:

conducting an atomic layer deposition (ALD) cycle of a first metal and a second metal, the ALD cycle comprising a reactive first metal precursor, a co-reactive first metal precursor, a reactive second metal precursor, and a co-reactive second metal precursor, wherein the reactive first metal precursor and the reactive second metal precursor each have the structure M-(L1) n , the co-reactive first metal precursor and the co-reactive second metal precursor each have the structure M-(L2) n , wherein M is germanium or antimony, L1 and L2 are ligands, and n is a number of ligands coordinated to the germanium or antimony;

conducting an ALD cycle of the second metal and tellurium, the ALD cycle comprising the reactive second metal precursor, the co-reactive second metal precursor, a reactive tellurium precursor, and a co-reactive tellurium precursor; and

repeating the ALD cycle of the first metal and the second metal and the ALD cycle of the second metal and a third metal.