Methods of forming semiconductor structures including III-V semiconductor material using substrates comprising molybdenum
Methods of fabricating semiconductor structures include the formation of molybdenum nitride at one or more surfaces of a substrate comprising molybdenum, and providing a layer of III-V semiconductor material, such as GaN, over the substrate. Semiconductor structures formed by methods described herein may include a substrate comprising molybdenum, molybdenum nitride at one or more surfaces of the substrate, and a layer of GaN bonded to the molybdenum nitride.
1. A method of fabricating a semiconductor structure, comprising:
forming molybdenum nitride at an at least substantially planar surface of a substrate comprising molybdenum; and
bonding a layer of GaN directly to an exposed major surface of the molybdenum nitride at the at least substantially planar surface of the substrate.
2. The method of claim 1 , further comprising selecting the substrate to be at least substantially comprised of molybdenum.
3. The method of claim 2 , further comprising selecting the substrate to be at least substantially comprised of polycrystalline molybdenum.
4. The method of claim 1 , wherein forming molybdenum nitride at the at least substantially planar surface of the substrate comprises at least substantially encapsulating the substrate with molybdenum nitride.
5. The method of claim 1 , wherein forming molybdenum nitride at the at least substantially planar surface of the substrate comprises introducing nitrogen into the at least substantially planar surface of the substrate and forming the molybdenum nitride in the at least substantially planar surface of a substrate.
6. The method of claim 1 , wherein forming molybdenum nitride at the at least substantially planar surface of the substrate comprises depositing molybdenum nitride on the at least substantially planar surface of the substrate.
7. The method of claim 6 , wherein depositing molybdenum nitride on the at least substantially planar surface of the substrate comprises depositing the molybdenum nitride using at least one of a chemical vapor deposition process, a sputtering process, and an atomic layer deposition process.
8. The method of claim 1 , wherein forming molybdenum nitride at the at least substantially planar surface of the substrate comprises growing molybdenum nitride on the at least substantially planar surface of the substrate.
9. The method of claim 1 , wherein forming molybdenum nitride at the at least substantially planar surface of the substrate comprises providing an exposed major surface of the molybdenum nitride with a surface roughness less than a surface roughness of the at least substantially planar surface of the substrate.
10. The method of claim 1 , wherein forming molybdenum nitride at the at least substantially planar surface of the substrate comprises providing an exposed major surface of the molybdenum nitride with a crystallinity less than a crystallinity of the at least substantially planar surface of the substrate.
11. The method of claim 10 , wherein providing the exposed major surface of the molybdenum nitride with a crystallinity less than a crystallinity of the at least substantially planar surface of the substrate prior to forming the molybdenum nitride comprises forming the molybdenum nitride to comprise amorphous molybdenum nitride.
12. The method of claim 10 , wherein providing the exposed major surface of the molybdenum nitride with a crystallinity less than a crystallinity of the at least substantially planar surface of the substrate prior to forming the molybdenum nitride comprises forming the molybdenum nitride to comprise material grains having an average grain size less than an average grain size of material grains of the substrate at the exposed major surface of the substrate.
13. The method of claim 1 , wherein forming molybdenum nitride at the at least substantially planar surface of the substrate comprises exposing the substrate to a microwave plasma comprising nitrogen radicals.
14. The method of claim 1 , wherein forming molybdenum nitride at the at least substantially planar surface of the substrate comprises utilizing a reactive sputtering process to deposit a molybdenum nitride film on the at least substantially planar surface of the substrate.
15. The method of claim 1 , wherein fon ling molybdenum nitride at the at least substantially planar surface of the substrate comprises annealing the substrate in an environment comprising nitrogen and hydrogen at a temperature greater than about 400° C.
16. The method of claim 1 , wherein forming molybdenum nitride at the at least substantially planar surface of the substrate comprises forming an exposed major surface of the molybdenum nitride to exhibit a hardness greater than a hardness exhibited by the exposed major surface of the substrate.
17. The method of claim 16 , further comprising forming the exposed major surface of the molybdenum nitride to exhibit a Vickers hardness HV of about 175 or more.
18. The method of claim 1 , further comprising subjecting the exposed major surface of the molybdenum nitride to at least one of a grinding process, a polishing process, and an etching process.
19. The method of claim 1 , wherein bonding a layer of GaN directly to an exposed major surface of the molybdenum nitride at the at least substantially planar surface of the substrate comprises:
implanting ions into a GaN donor structure and forming a weakened ion implant plane within the GaN donor structure, the layer of GaN defined on a side of the weakened ion implant plane;
bonding the GaN donor structure to the exposed major surface of the molybdenum nitride; and
fracturing the GaN donor structure along the weakened ion implant plane leaving the layer of GaN bonded to the exposed major surface of the molybdenum nitride.
20. The method of claim 1 , further comprising epitaxially growing at least one layer of III-V semiconductor material on the layer of GaN.