Display device and manufacturing method thereof
View Patent ↗It is an object of the present invention to form a pixel electrode and a metal film using one resist mask in manufacturing a stacked structure by forming the metal film over the pixel electrode. A conductive film to be a pixel electrode and a metal film are stacked. A resist pattern having a thick region and a region thinner than the thick region is formed over the metal film using an exposure mask having a semi light-transmitting portion. The pixel electrode, and the metal film formed over part of the pixel electrode to be in contact therewith are formed using the resist pattern. Accordingly, a pixel electrode and a metal film can be formed using one resist mask.
1. A display device comprising:
a gate electrode over a substrate;
a gate insulating film over the gate electrode;
an island-like semiconductor film over the gate insulating film;
a conductive layer over the island-like semiconductor film, the conductive layer being electrically connected to the island-like semiconductor film;
a transparent conductive film over the gate insulating film; and
a metal film over and in contact with the transparent conductive film, the metal film being electrically connected to the conductive layer,
wherein the transparent conductive film comprises a portion whose thickness is smaller than a thickness of a portion which is in contact with the metal film, and
wherein the transparent conductive film is a pixel electrode of a fringe field switching mode liquid crystal display device.
2. The display device according to claim 1 , wherein part of the transparent conductive film is interposed between the metal film and the conductive layer.
3. The display device according to claim 1 , wherein the transparent conductive film is in contact with a side surface of the island-like semiconductor film.
4. The display device according to claim 1 , wherein an outer edge of the metal film is inside an outer edge of the transparent conductive film.
5. An electronic device comprising:
the display device according to claim 1 ;
a speaker;
a microphone; and
a switch.
6. A display device comprising:
a gate electrode over a substrate;
a gate insulating film over the gate electrode;
an island-like semiconductor film over the gate insulating film;
a conductive layer over the island-like semiconductor film, the conductive layer being electrically connected to the island-like semiconductor film;
a transparent conductive film over the gate insulating film; and
a metal film over and in contact with the transparent conductive film, the metal film being electrically connected to the conductive layer,
wherein the transparent conductive film comprises a portion whose thickness is smaller than a thickness of a portion which is in contact with the metal film.
7. The display device according to claim 6 , wherein the transparent conductive film is a pixel electrode of a fringe field switching mode liquid crystal display device.
8. The display device according to claim 6 , wherein part of the transparent conductive film is interposed between the metal film and the conductive layer.
9. The display device according to claim 6 , wherein the transparent conductive film is in contact with a side surface of the island-like semiconductor film.
10. The display device according to claim 6 , wherein an outer edge of the metal film is inside an outer edge of the transparent conductive film.
11. An electronic device comprising:
the display device according to claim 6 ;
a speaker;
a microphone; and
a switch.
12. A display device comprising:
a gate electrode over a substrate;
a gate insulating film over the gate electrode;
an island-like semiconductor film over the gate insulating film;
a conductive layer over the island-like semiconductor film, the conductive layer being electrically connected to the island-like semiconductor film;
a transparent conductive film over the gate insulating film; and
a metal film over and in contact with the transparent conductive film, the metal film being electrically connected to the conductive layer,
wherein the transparent conductive film comprises a portion whose thickness is smaller than a thickness of a portion which is in contact with the metal film, and
wherein the transparent conductive film and the metal film each have a different taper angle.
13. The display device according to claim 12 , wherein part of the transparent conductive film is interposed between the metal film and the conductive layer.
14. The display device according to claim 12 , wherein the transparent conductive film is in contact with a side surface of the island-like semiconductor film.
15. The display device according to claim 12 , wherein an outer edge of the metal film is inside an outer edge of the transparent conductive film.
16. An electronic device comprising:
the display device according to claim 12 ;
a speaker;
a microphone; and
a switch.
17. The display device according to claim 12 , wherein the transparent conductive film is a pixel electrode of a fringe field switching mode liquid crystal display device.