Electrostatic actuator having urging members with varying rigidities
According to one embodiment, an electrostatic actuator includes a substrate, an electrode unit, a film body unit, and an urging unit. The electrode unit is provided on the substrate. The film body unit is provided to oppose the electrode unit and is conductive. The urging unit is configured to support the film body unit and includes a connection unit connected to the substrate and an elastic unit provided between the connection unit and the film body unit. A contacting state and a separated state are possible for the electrode unit and the film body unit according to a voltage applied to the electrode unit. The elastic unit has a branch portion between one end of the elastic unit connected to the connection unit and multiple one other ends of the elastic unit connected to the film body unit.
1. An electrostatic actuator, comprising:
a substrate;
an electrode unit provided on the substrate;
a film body unit provided to oppose the electrode unit, the film body unit being conductive and having a rectangular configuration; and
an urging unit including a connection unit and an elastic unit, the connection unit being connected to the substrate, the elastic unit being provided between the connection unit and the film body unit, the urging unit being configured to support the film body unit,
a contacting state and a separated state being possible for the electrode unit and the film body unit according to a voltage applied to the electrode unit,
the elastic unit having a plurality of branch portions connected in series between one end of the elastic unit connected to the connection unit and a plurality of one other ends of the elastic unit connected to the film body unit,
wherein the branch portions are configured such that the one other ends of the elastic unit are mutually disposed along the direction of the greater length of the rectangular configuration of the film body unit, and
wherein the one other ends of the elastic unit have lengths extending perpendicular to the direction of the greater length of the rectangular configuration.
2. The electrostatic actuator according to claim 1 , wherein:
the film body unit has a first hole extending in a first direction; and
the first direction is the direction of the greater length of the rectangular configuration of the film body unit.
3. The electrostatic actuator according to claim 2 , wherein the first hole is provided in a lateral-direction central portion of the film body unit.
4. The electrostatic actuator according to claim 1 comprising a plurality of the urging units,
one selected from the plurality of urging units being connected to a first circumferential edge portion of the film body unit,
one other selected from the plurality of urging units being connected to a second circumferential edge portion opposing the first circumferential edge portion.
5. The electrostatic actuator according to claim 4 , wherein the urging unit connected to the first circumferential edge portion and the urging unit connected to the second circumferential edge portion are provided at mutually-opposing positions.
6. The electrostatic actuator according to claim 2 , wherein:
the film body unit further has a second hole extending in a second direction; and
the second direction is orthogonal to the direction of the greater length of the rectangular configuration of the film body unit.
7. The electrostatic actuator according to claim 6 , wherein:
the film body unit has a plurality of the second holes;
one selected from the plurality of second holes is provided between the first hole and a first circumferential edge portion of the film body unit; and
one other selected from the plurality of second holes is provided between the first hole and a second circumferential edge portion opposing the first circumferential edge portion.
8. The electrostatic actuator according to claim 1 , wherein the urging unit has a plurality of the elastic units.
9. The electrostatic actuator according to claim 8 , wherein rigidities of the plurality of elastic units are mutually uniform between connection locations between the plurality of elastic units and the film body unit.
10. The electrostatic actuator according to claim 8 , wherein rigidities of the plurality of elastic units change in stages or gradually between connection locations between the plurality of elastic units and the film body unit.
11. An electrostatic actuator, comprising:
a substrate;
an electrode unit provided on the substrate;
a film body unit provided to oppose the electrode unit, the film body unit being conductive and having a rectangular configuration, the film body unit having a first hole extending in a first direction and a second hole extending in a second direction; and
an urging unit including a connection unit and an elastic unit, the connection unit being connected to the substrate, the elastic unit being provided between the connection unit and the film body unit, the urging unit being configured to support the film body unit,
a contacting state and a separated state being possible for the electrode unit and the film body unit according to a voltage applied to the electrode unit,
the elastic unit having a branch portion between one end of the elastic unit connected to the connection unit and a plurality of one other ends of the elastic unit connected to the film body unit,
wherein the branch portion is configured such that the one other ends of the elastic unit are mutually disposed along the direction of the greater length of the rectangular configuration of the film body unit,
wherein the one other ends of the elastic unit have lengths extending perpendicular to the direction of the greater length of the rectangular configuration,
wherein the first direction is the direction of the greater length of the rectangular configuration of the film body unit, and
wherein the second hole is provided between the first hole and a first circumferential edge portion of the film body unit or between the first hole and a second circumferential edge portion opposing the first circumferential edge portion.
12. The electrostatic actuator according to claim 11 , wherein the first hole is provided in a lateral-direction central portion of the film body unit.
13. The electrostatic actuator according to claim 11 comprising a plurality of the urging units,
one selected from the plurality of urging units being connected to the first circumferential edge portion,
one other selected from the plurality of urging units being connected to the second circumferential edge portion.
14. The electrostatic actuator according to claim 11 , wherein the urging unit connected to the first circumferential edge portion and the urging unit connected to the second circumferential edge portion are provided at mutually-opposing positions.
15. The electrostatic actuator according to claim 11 , wherein:
the film body unit has a plurality of the second holes;
one selected from the plurality of second holes is provided between the first hole and the first circumferential edge portion; and
one other selected from the plurality of second holes is provided between the first hole and the second circumferential edge portion.
16. The electrostatic actuator according to claim 11 , wherein the urging unit has a plurality of the elastic units.
17. The electrostatic actuator according to claim 16 , wherein rigidities of the plurality of elastic units are mutually uniform between connection locations between the plurality of elastic units and the film body unit.
18. The electrostatic actuator according to claim 16 , wherein rigidities of the plurality of elastic units change in stages or gradually between connection locations between the plurality of elastic units and the film body unit.