Inkjet head, inkjet recording apparatus, liquid droplet ejecting apparatus, and image forming apparatus
An inkjet head is disclosed. In the inkjet head a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned; a first insulating film and a second insulating film are formed between a dedicated electrode wiring and a lower electrode in an area in which the dedicated electrode wiring and the lower electrode overlap; a third insulating film and a fourth insulating film are stacked in an area which includes a forming area of the dedicated electrode wiring; in at least a portion of a forming area of the dedicated liquid chamber, there is provided a non-film forming area; and, in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area, or the fourth insulating film is formed in the non-film forming area.
1. An inkjet head, wherein a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned, each one of the dedicated liquid chambers being partitioned from the respectively neighboring one of the dedicated liquid chambers by a partition wall, and wherein a piezoelectric element is formed on the side facing the dedicated liquid chambers on the vibrating plate, the piezoelectric element including a lower electrode, a piezoelectric material, and an upper electrode, the inkjet head to be pulled out to a drive signal input section with a dedicated electrode wiring which is in conductive communication with the upper electrode; wherein
a first insulating film and a second insulating film are formed between the dedicated electrode wiring and the lower electrode at least in an area in which the dedicated electrode wiring and the lower electrode overlap; wherein
a third insulating film and a fourth insulating film are stacked in an area which includes a forming area of the dedicated electrode wiring except the drive signal input section; wherein,
in at least a portion of a forming area of the dedicated liquid chambers, there is provided a non-film forming area in which the second insulating film and the third insulating film are not formed, or in which the first insulating film and the second insulating film and the third insulating film are not formed; and wherein,
in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area in which the second insulating film and the third insulating film are not formed, or the fourth insulating film is formed in the non-film forming area in which the first insulating film and the second insulating film and the third insulating film are not formed.
2. The inkjet head as claimed in claim 1 , wherein, with respect to the first insulating film, there is a film thickness difference between the forming area of the dedicated liquid chambers and the other area;
and wherein a film thickness of the first insulating film which is formed in an area other than the forming area of the dedicated liquid chambers is larger than a film thickness of the first insulating film which is formed in the forming area of the dedicated liquid chambers.
3. The inkjet head as claimed in claim 1 , wherein, with respect to the fourth insulating film, there is no film thickness difference between the forming area of the dedicated liquid chambers and the other area.
4. The inkjet head as claimed in claim 1 , wherein, with respect to the first insulating film, there is a film thickness difference between the forming area of the dedicated liquid chambers and the other area; and wherein
a film density of the first insulating film which is formed in an area other than the forming area of the dedicated liquid chambers is larger than the film density of the first insulating film formed in the forming area of the dedicated liquid chambers.
5. The inkjet head as claimed in claim 1 , wherein, with respect to the fourth insulating film, there is no film thickness difference between the forming area of the dedicated liquid chambers and the other area.
6. The inkjet head as claimed in claim 1 , wherein a film thickness difference of the fourth insulating film between the forming area of the dedicated liquid chambers and the other area is less than a film thickness difference of the first insulating film between the forming area of the dedicated liquid chambers and the other area.
7. The inkjet head as claimed in claim 1 , wherein a film density difference of the fourth insulating film between the forming area of the dedicated liquid chambers and the other area is less than a film density difference of the first insulating film between the forming area of the dedicated liquid chambers and the other area.
8. The inkjet head as claimed in claim 1 , wherein the first insulating film and the fourth insulating film are made of the same material.
9. The inkjet head as claimed in claim 1 , wherein the first to the fourth insulating films are formed by a vapor deposition process.
10. The inkjet head as claimed in claim 1 , wherein the first insulating film and the fourth insulating film are formed using an ALD process.
11. The inkjet head as claimed in claim 1 , wherein, in an area other than the forming area of the dedicated liquid chambers, the first insulating film and the fourth insulating film are between 20 nm and 100 nm.
12. An inkjet recording apparatus which has installed thereon the inkjet head as claimed in claim 1 .
13. A liquid droplet ejecting apparatus which has installed thereon the inkjet head as claimed in claim 1 .
14. An image forming apparatus which has installed thereon the inkjet head as claimed in claim 1 .
15. An image forming apparatus which has installed thereon the inkjet recording apparatus as claimed in claim 12 .
16. An image forming apparatus which has installed thereon the liquid droplet ejecting apparatus as claimed in claim 13 .
17. An inkjet head, wherein a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned, each one of the dedicated liquid chambers being partitioned from the respectively neighboring one of the dedicated liquid chambers by a partition wall, and wherein a piezoelectric element is formed on the side facing the dedicated liquid chambers on the vibrating plate, the piezoelectric element including a lower electrode, a piezoelectric material, and an upper electrode, the inkjet head to be pulled out to a drive signal input section with a dedicated electrode wiring which is in conductive communication with the upper electrode; wherein
a first insulating film and a second insulating film are formed between the dedicated electrode wiring and the lower electrode at least in an area in which the dedicated electrode wiring and the lower electrode overlap; wherein
a fourth insulating film is stacked in an area which includes a forming area of the dedicated electrode wiring except the drive signal input section; wherein,
in at least a portion of a forming area of the dedicated liquid chambers, there is provided a non-film forming area in which the second insulating film is not formed, or in which the first insulating film and the second insulating film are not formed; and wherein,
in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area in which the second insulating film is not formed, or the fourth insulating film is formed in the non-film forming area in which the first insulating film and the second insulating film are not formed.