Method for processing an embedded metal film
View Patent ↗A method for processing a metal film ( 1 ) embedded in a carrier ( 2 ) includes the step of heating the metal film ( 1 ) in such a way that the metal film ( 1 ) is transformed in a subregion into at least one insulator section ( 3 ). The metal film ( 1 ) is preferably locally heated by laser radiation ( 4 ). Also described is a component ( 10, 11, 12, 13 ) which is produced by the method and includes an electrostatic clamp, a drive mechanism which is adapted for moving a workpiece under the action of electrical fields, a resistor element or a display device, for example.
1. A method for producing a holding carrier of an electrostatic clamp having at least two planar electrodes which are suitable for having an electrostatic clamping voltage applied thereto, said method comprising the steps of:
providing the holding carrier by anodic bonding of two electrically insulating carrier elements, wherein at least one of the carrier elements is transparent, and a bonding electrode metal film is arranged between the carrier elements such that the bonding electrode metal film is embedded in the holding carrier, and
locally heating the bonding electrode metal film embedded in the holding carrier by laser radiation in such a way that the bonding electrode metal film is transformed in a portion into at least one insulator section, wherein
the at least two planar electrodes of the electrostatic clamp are created by dividing the bonding electrode metal film into at least two portions being separated from one another by the at least one insulator section, and
the locally heating step comprises moving the holding carrier and an optical path of the laser radiation relative to one another to transform the bonding electrode metal film into the at least one insulator section along a line or an area.
2. The method according to claim 1 , further comprising at least one feature selected from the group consisting of:
the bonding electrode metal film is locally heated by laser radiation having a wavelength at which the carrier is transparent,
the bonding electrode film is locally heated by focused or defocused laser radiation,
the carrier contains an oxygen-containing material, and
metal contained in the bonding electrode metal film is oxidized by the heating.
3. The method according to claim 1 , wherein the carrier elements are made of at least one of glass and ceramic.
4. The method according to claim 1 , wherein the bonding electrode metal film is formed from at least one of Cr, Ti and Al.
5. The method according to claim 1 , wherein the at least one insulator section from the bonding electrode metal film forms at least one electrode in a predetermined shape, and the at least one insulator section in the carrier forms a predetermined pattern.
6. The method according to claim 1 , wherein the at least two planar electrodes are suitable for having applied thereto a voltage of ±4 kV.