Semiconductor device enabling further microfabrication
A semiconductor device includes a plurality of MOS transistors and wiring connected to a source electrode or a drain electrode of the plurality of MOS transistors and, the wiring being provided in the same layer as the source electrode and the drain electrode in a substrate, or in a position deeper than a surface of the substrate.
1. A semiconductor device comprising:
an active region;
a trench selectively formed in the active region to divide the active region into first and second regions, the first and second regions being disposed in line in a first direction, the trench including first and second portions that are disposed in line in a second direction and a third portion that is between the first and second portions, the second direction crossing the first direction, each of the first and second portions of the trench being greater in depth than the third portion of the trench;
a source region formed in the first region;
a drain region formed in the second region; and
a gate electrode formed in the trench, the gate electrode including first and second parts corresponding respectively to the first and second portions of the trench and a third part corresponding to the third portion of the trench so that each of the first and second parts protruding downwardly than the third part.
2. The semiconductor device according to claim 1 , further comprising:
an upper surface of the gate electrode, the upper surface that is lower than each of upper surface of the source and drain regions to provide a step therebetween; and
an insulating film filling the step between the upper surface of the gate electrode and each of the upper surface of the source and drain regions.
3. The semiconductor device according to claim 2 , further comprising a first semiconductor island that covers the source region, the first semiconductor island including a single-crystal structure that grew up from an interface with the source region.
4. The semiconductor device according to claim 2 , further comprising a second semiconductor island that covers the drain region, the second semiconductor island including a single-crystal structure that grew up from an interface with the drain region.
5. The semiconductor device according to claim 4 , further comprising a conductive line being disposed over the gate electrode in the first direction and connected to the second semiconductor island.
6. The semiconductor device according to claim 5 , further comprising a data storage element being disposed over the conductive line and connected to the source region.
7. The semiconductor device according to claim 2 , further comprising a conductive line being disposed over the gate electrode in the first direction and connected to the drain region.
8. The semiconductor device according to claim 7 , further comprising a data storage element being disposed over the conductive line and connected to the source region.
9. The semiconductor device according to claim 8 , wherein the data storage element is a capacitor including a lower electrode, a capacitor insulator and an upper electrode.
10. A semiconductor device comprising:
an active region;
a trench selectively formed in the active region to divide the active region into first and second regions, the first and second regions being disposed in line in a first direction, the trench including first and second portions that are disposed in line in a second direction and a third portion that is between the first and second portions, the second direction crossing the first direction, each of the first and second portions of the trench being greater in depth than the third portion of the trench;
a source region formed in the first region;
a drain region formed in the second region;
a gate electrode formed in the trench, the gate electrode including first and second parts corresponding respectively to the first and second portions of the trench and a third part corresponding to the third portion of the trench so that each of the first and second parts protruding downwardly than the third part, the gate electrode including an upper surface that is lower than each of upper surface of the source and drain regions to provide a step therebetween; and
an insulating film filling the step between the upper surface of the gate electrode and each of the upper surface of the source and drain regions.
11. The semiconductor device according to claim 10 , further comprising a semiconductor island that covers the drain region and a part of the insulating film, the semiconductor island including a single-crystal structure that grew up from an interface with the drain region.
12. The semiconductor device according to claim 11 , further comprising a conductive line being disposed over the gate electrode in the first direction and connected to the semiconductor island.
13. The semiconductor device according to claim 12 , further comprising;
a contact plug connecting to the source region; and
a data storage element being disposed over the conductive line and connected to the contact plug.
14. The semiconductor device according to claim 13 , wherein the data storage element is a capacitor including a lower electrode, a capacitor insulator and an upper electrode.