Patent Application
Utility
App. No. 13/425,646
· Confirmation No. 6557
CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLASMA DEPOSITION AND RESPUTTERING UNIFORMITY
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-01-29 | ABN |
Abandonment | 2 | View | |
| 2015-01-22 | CTFR |
Final Rejection | 16 | View | |
| 2015-01-22 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2015-01-22 | FWCLM |
Index of Claims | 1 | View | |
| 2014-11-07 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2014-11-07 | CLM |
Claims | 5 | View | |
| 2014-11-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2014-11-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2014-11-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2014-11-07 | TRAN.LET |
Transmittal Letter | 5 | View | |
| 2014-11-07 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2014-11-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2014-09-29 | CTNF |
Non-Final Rejection | 15 | View | |
| 2014-09-29 | 892 |
List of references cited by examiner | 1 | View | |
| 2014-09-29 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2014-09-29 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2014-09-29 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2014-09-29 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2014-09-29 | SRNT |
Examiner's search strategy and results | 5 | View | |
| 2014-09-29 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2014-09-29 | FWCLM |
Index of Claims | 1 | View | |
| 2014-09-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2014-09-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2014-09-10 | TRAN.LET |
Transmittal Letter | 5 | View | |
| 2014-09-02 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2014-09-02 | CLM |
Claims | 5 | View | |
| 2014-09-02 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2014-09-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2014-09-02 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2014-08-14 | CTRS |
Requirement for Restriction/Election | 6 | View | |
| 2014-08-14 | FWCLM |
Index of Claims | 1 | View | |
| 2012-09-13 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2012-09-13 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2012-09-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-09-13 | TRAN.LET |
Transmittal Letter | 5 | View | |
| 2012-07-09 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2012-07-09 | 371P |
Documents submitted with 371 (National Stage) Applications | 5 | View | |
| 2012-07-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-07-09 | TRAN.LET |
Transmittal Letter | 5 | View | |
| 2012-06-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-06-07 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2012-06-01 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 1 | View | |
| 2012-06-01 | OATH |
Oath or Declaration filed | 4 | View | |
| 2012-06-01 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-06-01 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-04-03 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2012-04-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-04-03 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2012-03-21 | ADS |
Application Data Sheet | 5 | View | |
| 2012-03-21 | SPEC |
Specification | 52 | View | |
| 2012-03-21 | CLM |
Claims | 9 | View | |
| 2012-03-21 | ABST |
Abstract | 1 | View | |
| 2012-03-21 | DRW |
Drawings-only black and white line drawings | 18 | View | |
| 2012-03-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-03-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-03-21 | 136A |
Authorization for Extension of Time all replies | 2 | View |
Inventors
Liqi Wu
Santa Clara, CA
Ishtak Karim
San Jose, CA
Huatan Qiu
Dublin, CA
Kie-Jin Park
San Jose, CA
Chunming Zhou
Milpitas, CA
Karthik Colinjivadi
San Jose, CA
Attorneys & Agents of Record
Classification
USPC
204/298.16
C23C14/18
C23C14/046
C23C14/35
C23C14/358
H01J37/3402
H01J37/3405
Prosecution
- Examiner
- ABRAHAM, IBRAHIME A
- Art Unit
- 1756
- Customer No.
- 91286
- Docket No.
- NVLS003634CP1
- Confirmation No.
- 6557
Publication
- Pub. No.
- US20120228125A1
- Pub. Date
- 2012-09-13
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2012-06-04
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Quick Facts
- App. No.
- 13/425,646
- Filed
- 2012-03-21
- Pub. No.
- US20120228125A1
- Examiner
- ABRAHAM, IBRAHIME A
- Art Unit
- 1756
External Links