Patent Application
Provisional
App. No. 61/384,917
· Confirmation No. 1747
CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLASMA DEPOSITION AND RESPUTTERING UNIFORMITY
Provisional Application Expired
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2010-10-04 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-09-21 | ADS |
Application Data Sheet | 6 | View | |
| 2010-09-21 | SPEC |
Specification | 8 | View | |
| 2010-09-21 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2010-09-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-09-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Liqi Wu
Santa Clara, CA
Ishtak Karim
San Jose, CA
Huatan Qiu
San Jose, CA
Kie-Jin Park
San Jose, CA
Chunming Zhou
Milipitas, CA
Karthik Colinjivadi
San Jose, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 91286
- Docket No.
- NVLS003634P1
- Confirmation No.
- 1747
Child
Claims priority from a provisional application
→
App. 13/224,077
Filed 2011-09-01
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
Claims priority from a provisional application
→
PCT/US2011/052292
Filed 2011-09-20
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 13/425,646
Filed 2012-03-21
· Abandoned -- Failure to Respond to an Office Action
No recorded assignments were found for this patent.
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 61/384,917
- Filed
- 2010-09-21
External Links