Semiconductor device and method for manufacturing the same
View Patent ↗A transistor including an oxide semiconductor with favorable electric characteristics and a manufacturing method thereof are provided. A semiconductor device includes a transistor. The transistor includes an oxide semiconductor film over a base insulating film, a gate electrode overlapping with the oxide semiconductor film with a gate insulating film interposed therebetween, and a pair of electrodes in contact with the oxide semiconductor film and serving as a source electrode and a drain electrode. The base insulating film includes a first oxide insulating film partly in contact with the oxide semiconductor film and a second oxide insulating film in the periphery of the first oxide insulating film. An end portion of the oxide semiconductor film which crosses the channel width direction of the transistor is located over the first oxide insulating film.
1. A semiconductor device comprising:
a transistor, the transistor comprising:
a first oxide insulating film;
a second oxide insulating film surrounding the first oxide insulating film;
an oxide semiconductor film over the first oxide insulating film;
a gate insulating film over the oxide semiconductor film;
a gate electrode overlapping with the oxide semiconductor film with the gate insulating film interposed therebetween; and
a pair of electrodes over the oxide semiconductor film,
wherein an end portion of the oxide semiconductor film which crosses a channel width direction of the transistor is located over the first oxide insulating film, and
wherein an end portion of the oxide semiconductor film which crosses a channel length direction of the transistor is located over the second oxide insulating film.
2. The semiconductor device according to claim 1 , wherein the first oxide insulating film is a silicon oxide film or a silicon oxynitride film.
3. The semiconductor device according to claim 1 , wherein the second oxide insulating film is an aluminum oxide film or an aluminum oxynitride film.
4. The semiconductor device according to claim 1 , wherein a sidewall insulating film is provided on a side surface of the gate electrode, and the pair of electrodes are in contact with part of the oxide semiconductor film and part of the sidewall insulating film.
5. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film includes a first region overlapping with the gate electrode and a pair of second regions sandwiching the first region, and
wherein the pair of second regions contain dopant.
6. The semiconductor device according to claim 5 , wherein the dopant is at least one of boron, nitrogen, phosphorus, and arsenic.
7. The semiconductor device according to claim 5 , wherein the dopant is at least one of helium, neon, argon, krypton, and xenon.
8. The semiconductor device according to claim 5 , wherein the pair of second regions contain the dopant at higher than or equal to 5×10 18 atoms/cm 3 and lower than or equal to 1×10 22 atoms/cm 3 .
9. The semiconductor device according to claim 1 , wherein an average surface roughness of the first oxide insulating film and an average surface roughness of the second oxide insulating film are each less than 0.5 nm.
10. The semiconductor device according to claim 1 , wherein the oxide semiconductor film contains at least one element of In, Ga, Sn, and Zn.
11. The semiconductor device according to claim 1 , wherein the semiconductor device is one selected from the group consisting of a portable information terminal, a portable music player, a mobile phone, and a television set.
12. A semiconductor device comprising:
a transistor, the transistor comprising:
a first oxide insulating film, the first oxide insulating film including a projecting portion and a groove around the projecting portion;
a second oxide insulating film in the groove;
an oxide semiconductor film over the first oxide insulating film;
a gate insulating film over the oxide semiconductor film;
a gate electrode overlapping with the oxide semiconductor film with the gate insulating film interposed therebetween; and
a pair of electrodes over the oxide semiconductor film,
wherein an end portion of the oxide semiconductor film which crosses a channel width direction of the transistor is located over the projecting portion of the first oxide insulating film, and
wherein an end portion of the oxide semiconductor film which crosses a channel length direction of the transistor is located over the second oxide insulating film.
13. The semiconductor device according to claim 12 , wherein the first oxide insulating film is a silicon oxide film or a silicon oxynitride film.
14. The semiconductor device according to claim 12 , wherein the second oxide insulating film is an aluminum oxide film or an aluminum oxynitride film.
15. The semiconductor device according to claim 12 , wherein a sidewall insulating film is provided on a side surface of the gate electrode, and the pair of electrodes are in contact with part of the oxide semiconductor film and part of the sidewall insulating film.
16. The semiconductor device according to claim 12 ,
wherein the oxide semiconductor film includes a first region overlapping with the gate electrode and a pair of second regions sandwiching the first region, and
wherein the pair of second regions contain dopant.
17. The semiconductor device according to claim 16 , wherein the dopant is at least one of boron, nitrogen, phosphorus, and arsenic.
18. The semiconductor device according to claim 16 , wherein the dopant is at least one of helium, neon, argon, krypton, and xenon.
19. The semiconductor device according to claim 16 , wherein the pair of second regions contain the dopant at higher than or equal to 5×10 18 atoms/cm 3 and lower than or equal to 1×10 22 atoms/cm 3 .
20. The semiconductor device according to claim 12 , wherein an average surface roughness of the first oxide insulating film and an average surface roughness of the second oxide insulating film are each less than 0.5 nm.
21. The semiconductor device according to claim 12 , wherein the oxide semiconductor film contains at least one element of In, Ga, Sn, and Zn.
22. The semiconductor device according to claim 12 , wherein the semiconductor device is one selected from the group consisting of a portable information terminal, a portable music player, a mobile phone, and a television set.
23. A semiconductor device comprising:
a transistor, the transistor comprising:
a first oxide insulating film containing oxygen at a proportion exceeding a stoichiometric proportion of the first oxide insulating film;
a second oxide insulating film surrounding the first oxide insulating film and preventing diffusion of oxygen;
an oxide semiconductor film over the first oxide insulating film;
a gate insulating film over the oxide semiconductor film;
a gate electrode overlapping with the oxide semiconductor film with the gate insulating film interposed therebetween; and
a pair of electrodes over the oxide semiconductor film,
wherein an end portion of the oxide semiconductor film which crosses a channel width direction of the transistor is located over the first oxide insulating film, and
wherein an end portion of the oxide semiconductor film which crosses a channel length direction of the transistor is located over the second oxide insulating film.
24. The semiconductor device according to claim 23 ,
wherein the oxide semiconductor film includes a first region overlapping with the gate electrode and a pair of second regions sandwiching the first region, and
wherein the pair of second regions contain dopant.
25. The semiconductor device according to claim 24 , wherein the dopant is at least one of boron, nitrogen, phosphorus, and arsenic.
26. The semiconductor device according to claim 24 , wherein the dopant is at least one of helium, neon, argon, krypton, and xenon.
27. The semiconductor device according to claim 23 , wherein the oxide semiconductor film contains at least one element of In, Ga, Sn, and Zn.
28. The semiconductor device according to claim 23 , wherein the semiconductor device is one selected from the group consisting of a portable information terminal, a portable music player, a mobile phone, and a television set.
29. A method for manufacturing a semiconductor device, comprising:
forming a first oxide insulating film;
etching part of the first oxide insulating film, so that a projecting portion and a groove around the projecting portion of the first oxide insulating film are formed;
forming a second oxide insulating film in the groove;
forming a first oxide semiconductor film such that at least part of an end portion of the first oxide semiconductor film which crosses a channel width direction is located over the projecting portion of the first oxide insulating film and at least part of an end portion of the first oxide semiconductor film which crosses a channel length direction is located over the second oxide insulating film;
forming an insulating film over the projecting portion of the first oxide insulating film, the second oxide insulating film, and the first oxide semiconductor film;
performing heat treatment, thereby forming a second oxide semiconductor film;
forming a gate electrode over the insulating film;
etching part of the insulating film, thereby exposing part of the second oxide semiconductor film and forming a gate insulating film; and
forming a pair of electrodes over the exposed part of the second oxide semiconductor film.
30. The method for manufacturing a semiconductor device, according to claim 29 , wherein the first oxide insulating film is formed so as to contain oxygen at a proportion exceeding a stoichiometric proportion of the first oxide insulating film.
31. The method for manufacturing a semiconductor device, according to claim 29 , wherein the heat treatment is performed at a temperature at which hydrogen is released from the second oxide semiconductor film and oxygen is diffused from the first oxide insulating film to the second oxide semiconductor film.
32. The method for manufacturing a semiconductor device, according to claim 29 , wherein the heat treatment is performed at a temperature of higher than or equal to 150° C. and lower than a strain point of a substrate over which the first oxide insulating film and the second oxide insulating film are formed.
33. The method for manufacturing a semiconductor device, according to claim 29 , wherein planarization treatment is performed on the projecting portion of the first oxide insulating film and the second oxide insulating film after the second oxide insulating film is formed before the first oxide semiconductor film is formed.
34. The method for manufacturing a semiconductor device, according to claim 29 , wherein dopant is added to the second oxide semiconductor film after the gate electrode is formed over the gate insulating film before the pair of electrodes over the exposed part of the second oxide semiconductor film are formed, thereby forming a first region overlapping with the gate electrode and a pair of second regions sandwiching the first region.
35. The method for manufacturing a semiconductor device, according to claim 34 , wherein the dopant is at least one of boron, nitrogen, phosphorus, and arsenic.
36. The method for manufacturing a semiconductor device, according to claim 34 , wherein the dopant is at least one of helium, neon, argon, krypton, and xenon.
37. The method for manufacturing a semiconductor device, according to claim 29 , wherein the first oxide semiconductor film and the second oxide semiconductor film each contain at least one element of In, Ga, Sn, and Zn.