Semiconductor device and manufacturing method therefor
View Patent ↗This semiconductor device according to the present invention includes a plurality of cylindrical lower electrodes aligned densely in a memory array region; a plate-like support which is contacted on the side surface of the cylindrical lower electrodes, and links to support the plurality of the cylindrical lower electrodes; a pore portion provided in the plate-like support; a dielectric film covering the entire surface of the cylindrical lower electrodes and the plate-like support in which the pore portion is formed; and an upper electrode formed on the surface of the dielectric film, wherein the boundary length of the part on the side surface of the cylindrical lower electrode which is exposed on the pore portion is shorter than the boundary length of the part on the side surface of the cylindrical lower electrode which is not exposed on the pore portion.
1. A semiconductor device comprising a plurality of capacitors, each of the capacitors comprising:
a plurality of cylindrical lower electrodes each having a top open edge defining an approximately circular or oval opening,
an upper electrode,
a dielectric film between the cylindrical lower electrodes and the upper electrode, and
a plate support which is contacted on a side surface of the cylindrical lower electrodes at a contacting portion, and links to support the cylindrical lower electrodes, and the dielectric film covers an entire surface of the cylindrical lower electrodes and the plate support,
wherein a part of a top open edge of each cylindrical lower electrode is dented toward a bottom end thereof as compared to a remaining part of the top open edge of the cylindrical lower electrode,
wherein the cylindrical lower electrodes have an extending portion above a top surface of the plate support.
2. The semiconductor device according to claim 1 , wherein the plate support is in contact with the remaining part of the top open edge of the cylindrical lower electrode to support the capacitors.
3. The semiconductor device according to claim 1 , wherein a pore portion is selectively formed in the plate support in a hole shape, the plate support including a side surface defining the pore portion, the remaining part of the top open edge of the cylindrical lower electrode being in contact with a portion of a side surface of the plate support, the part of the top open edge of the cylindrical lower electrode included in the pore portion.
4. The semiconductor device according to claim 3 , wherein a plurality of pore portions are arranged in a row at a first pitch extending in a first direction, the row being arranged repeatedly in a second pitch in a second direction.
5. The semiconductor device according to claim 4 , wherein neighboring rows are shifted by a predetermined distance.
6. The semiconductor device according to claim 4 , wherein neighboring rows are shifted by a half of the first pitch.
7. The semiconductor device according to claim 1 , wherein the plate support is in contact with the cylindrical conductor, a top surface of the plate support being located at a lower position than a topmost portion of the cylindrical conductor and a lower surface of the plate support being located at a position upwards of a lowest portion of the cylindrical conductor.
8. The semiconductor device according to claim 1 , wherein the upper electrode covers a lower surface of the plate support via the dielectric film.
9. The semiconductor device according to claim 1 , wherein an ellipsoidal pore portion is formed in the plate support.
10. A semiconductor device comprising:
a substrate;
a first electrode formed over the substrate, the first electrode comprising a cylindrical conductor;
a plate support being in contact with a sidewall of a contact portion of a top open edge of the cylindrical conductor, a top end of the contact portion of the top open edge of the cylindrical conductor being located at an upper position than a top end of a remaining portion of the top open edge of the cylindrical conductor;
a dielectric film covering a surface of the first electrode; and
a second electrode covering the dielectric film,
wherein the cylindrical lower electrodes have an extending portion above a top surface of the plate support.
11. The semiconductor device according to claim 10 , wherein a pore portion is selectively formed in the plate support in a hole shape, the plate support including a side surface defining the pore portion, the contact portion of the top open edge of the cylindrical conductor being in contact with a portion of a side surface of the plate support, the remaining portion of the top open edge of the cylindrical conductor being included in the pore portion.
12. The semiconductor device according to claim 11 ,
wherein a plurality of pore portions arranged in a row at a first pitch extending in a first direction, the row being arranged repeatedly in a second pitch in a second direction, and
neighboring rows are shifted by a half of the first pitch.
13. The semiconductor device according to claim 10 , wherein the top end of the remaining portion of the top open edge of the cylindrical conductor is located at lower position than a lower surface of the plate support.
14. The semiconductor device according to claim 10 , wherein the plate support is not in contact with a sidewall that includes a part of the remaining portion of the top open edge of the cylindrical conductor.
15. The semiconductor device according to claim 10 , wherein a lower surface of the plate support is covered with the dielectric film.
16. A semiconductor device comprising:
a substrate;
a cylindrical lower electrode formed over the substrate, the cylindrical lower electrode having a sidewall portion and a bottom portion, the sidewall portion comprising a first sidewall portion and a second sidewall portion, the first sidewall portion having a first top open edge, the second sidewall portion having a second top open edge, the first top open edge of the first sidewall portion being located at upper position than the second top open edge of the second sidewall;
a dielectric film covering the cylindrical lower electrode;
an upper electrode covering the dielectric film; and
a plate support being in contact with a part of the first sidewall portion at a contacting portion,
wherein the cylindrical lower electrodes have an extending portion above a top surface of the plate support.
17. The semiconductor device according to claim 16 , wherein a pore portion is selectively formed in the plate support in a hole shape, the plate support including a side surface defining the pore portion, the first sidewall portion of the cylindrical electrode being in contact with a portion of the side surface of the plate support, a top open edge of the second sidewall portion of the cylindrical electrode being included in the pore portion.
18. The semiconductor device according to claim 17 , wherein a plurality of pore portions arranged in a row at a first pitch extending in a first direction, the row being arranged repeatedly in a second pitch in a second direction, and
neighboring rows are shifted by a half of the first pitch.
19. The semiconductor device according to claim 16 , wherein the upper electrode is disposed on a lower surface of the plate support, the lower surface of the plate support facing to the substrate.
20. The semiconductor device according to claim 16 , wherein the plate support is not in contact with the sidewall of the second sidewall portion.