Patent Application
Utility
App. No. 13/443,891
· Confirmation No. 4406
APPARATUS AND METHODS FOR CLEANING AND DRYING OF WAFERS
Inventors:
Boon Meng SEAH, Bei Chao ZHANG, Raymond JOY, Shao Beng LAW, John SUDIJONO, Liang Choo HSIA
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-01-25 | ABN |
Abandonment | 2 | View | |
| 2016-07-11 | CTNF |
Non-Final Rejection | 7 | View | |
| 2016-07-11 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-07-11 | FWCLM |
Index of Claims | 1 | View | |
| 2016-07-11 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2016-07-11 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-04-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-04-25 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2016-04-25 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2016-04-25 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-04-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-04-25 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2016-04-25 | CLM |
Claims | 6 | View | |
| 2016-04-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2016-04-13 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2016-04-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-04-13 | AF/D.OTHER |
Affidavit-not covered under specific rule | 3 | View | |
| 2016-01-25 | CTFR |
Final Rejection | 10 | View | |
| 2016-01-25 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-01-25 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-01-25 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2016-01-25 | FWCLM |
Index of Claims | 1 | View | |
| 2015-09-21 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2015-09-21 | CLM |
Claims | 5 | View | |
| 2015-09-21 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2015-09-21 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2015-09-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-09-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2015-09-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2015-06-19 | CTNF |
Non-Final Rejection | 7 | View | |
| 2015-06-19 | 892 |
List of references cited by examiner | 1 | View | |
| 2015-06-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2015-06-19 | 1449 |
List of References cited by applicant and considered by examiner | 7 | View | |
| 2015-06-19 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2015-06-19 | FOR |
Foreign Reference | 53 | View | |
| 2015-06-19 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2015-06-19 | FWCLM |
Index of Claims | 1 | View | |
| 2012-10-11 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2012-07-02 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-07-02 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2012-06-25 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 1 | View | |
| 2012-06-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2012-06-25 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2012-06-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-06-25 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2012-04-25 | NT.CR.APP.PA |
Notice to File Corrected Application Papers | 2 | View | |
| 2012-04-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-04-25 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2012-04-25 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2012-04-11 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 7 | View | |
| 2012-04-11 | OATH |
Oath or Declaration filed | 5 | View | |
| 2012-04-11 | PA.. |
Power of Attorney | 2 | View | |
| 2012-04-11 | SPEC |
Specification | 16 | View | |
| 2012-04-11 | CLM |
Claims | 5 | View | |
| 2012-04-11 | ABST |
Abstract | 1 | View | |
| 2012-04-11 | OATH |
Oath or Declaration filed | 5 | View | |
| 2012-04-11 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-04-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2012-04-11 | ADS |
Application Data Sheet | 6 | View | |
| 2012-04-11 | DRW |
Drawings-only black and white line drawings | 4 | View |
Inventors
Boon Meng SEAH
Singapore, SINGAPORE
Bei Chao ZHANG
Singapore, SINGAPORE
Raymond JOY
Singapore, SINGAPORE
Shao Beng LAW
Singapore, SINGAPORE
John SUDIJONO
Singapore, SINGAPORE
Liang Choo HSIA
Singapore, SINGAPORE
Attorneys & Agents of Record
Classification
USPC
134/94.1
H10P72/0406
H10P72/0424
H10P72/0414
Prosecution
- Examiner
- RIGGLEMAN, JASON PAUL
- Art Unit
- 1711
- Customer No.
- 16162
- Docket No.
- CSM P 2007 NAT 44 US 1
- Confirmation No.
- 4406
Publication
- Pub. No.
- US20120255586A1
- Pub. Date
- 2012-10-11
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-07-02
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Quick Facts
- App. No.
- 13/443,891
- Filed
- 2012-04-11
- Pub. No.
- US20120255586A1
- Examiner
- RIGGLEMAN, JASON PAUL
- Art Unit
- 1711
External Links