Semiconductor device with capacitor connected to memory element through oxide semiconductor film
Provided is a semiconductor device which has low power consumption and can operate at high speed. The semiconductor device includes a memory element including a first transistor including crystalline silicon in a channel formation region, a capacitor for storing data of the memory element, and a second transistor which is a switching element for controlling supply, storage, and release of charge in the capacitor. The second transistor is provided over an insulating film covering the first transistor. The first and second transistors have a source electrode or a drain electrode in common.
1. A semiconductor device comprising:
a volatile memory element able to hold a bit of information;
a capacitor;
a switch configured to control transfer of electric charges between the volatile memory element and the capacitor so that the switch and the capacitor are able to hold the bit of information in a non-volatile manner;
a first transistor in the volatile memory element; and
an insulating film over the first transistor,
wherein the switch comprises a second transistor formed over the insulating film, the second transistor comprising an oxide semiconductor film as an active layer.
2. The semiconductor device according to claim 1 ,
wherein the semiconductor device is configured to hold the bit of information in the volatile memory element when power is supplied to the semiconductor device, and
wherein the semiconductor device is configured to hold the bit of information by using the switch and the capacitor when power is not supplied to the semiconductor device.
3. The semiconductor device according to claim 1 ,
wherein the first transistor comprises silicon having crystallinity or germanium having crystallinity in an active layer.
4. The semiconductor device according to claim 1 , further comprising:
a semiconductor substrate,
wherein the first transistor comprises a channel formation region in the semiconductor substrate.
5. The semiconductor device according to claim 1 ,
wherein one of a source electrode and a drain electrode of the first transistor is electrically connected to one of a source electrode and a drain electrode of the second transistor, and
wherein the other of the source electrode and the drain electrode of the second transistor is electrically connected to an electrode of the capacitor.
6. The semiconductor device according to claim 1 ,
wherein an electrode of the capacitor and at least one of a source electrode and a drain electrode of the second transistor are made from a same film.
7. The semiconductor device according to claim 1 ,
wherein the second transistor comprises a gate electrode, and a gate insulating film interposed between the oxide semiconductor film and the gate electrode,
the semiconductor device further comprising:
an oxide insulating film containing oxygen, the oxide semiconductor film being interposed between the oxide insulating film and the gate insulating film,
wherein a region of the oxide insulating film is in direct contact with a region of the oxide semiconductor film, the region of the oxide semiconductor film overlapping with the gate electrode.
8. The semiconductor device according to claim 1 ,
wherein the second transistor comprises a gate electrode, and a gate insulating film interposed between the oxide semiconductor film and the gate electrode,
the semiconductor device further comprising:
a first insulating film, the first insulating film being an oxide insulating film containing oxygen; and
a second insulating film over the first insulating film,
wherein the oxide semiconductor film is interposed between the gate insulating film and the first insulating film, and
wherein a region of the first insulating film is in direct contact with a region of the oxide semiconductor film through an opening in the second insulating film, the region of the oxide semiconductor film overlapping with the gate electrode.
9. The semiconductor device according to claim 1 ,
wherein the second transistor comprises a gate electrode, and a gate insulating film interposed between the oxide semiconductor film and the gate electrode,
the semiconductor device further comprising:
a first insulating film, the first insulating film being a first oxide insulating film containing oxygen;
a second insulating film over the first insulating film; and
a third insulating film interposed between the first insulating film and the second insulating film, the third insulating film being a second oxide insulating film containing oxygen,
wherein the oxide semiconductor film is interposed between the gate insulating film and the first insulating film,
wherein a region of the first insulating film is in direct contact with a region of the oxide semiconductor film through an opening in each of the second insulating film and the third insulating film, the region of the oxide semiconductor film overlapping with the gate electrode, and
wherein a side portion of the oxide semiconductor film is in direct contact with the third insulating film.
10. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film includes a c-axis aligned crystalline oxide semiconductor.
11. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film comprises an In—Ga—Zn-based oxide.
12. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film of the second transistor comprises a material represented by InMO 3 (ZnO) m , where m>0 is satisfied, m is not an integer, and M represents one or more metal elements selected from Ga, Fe, Mn, and Co.
13. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film of the second transistor comprises a material represented by In 3 SnO 5 (ZnO) n where n>0 is satisfied, and n is not an integer.
14. A processing unit comprising the semiconductor device according to claim 1 .
15. A buffer memory device comprising the semiconductor device according to claim 1 .
16. A portable electronic device comprising the semiconductor device according to claim 1 .
17. A semiconductor device comprising:
a memory element comprising a first transistor;
an insulating film over the first transistor;
a second transistor over the insulating film, the second transistor comprising a gate electrode, an oxide semiconductor film overlapping with the gate electrode, a gate insulating film interposed between the gate electrode and the oxide semiconductor film, a source electrode, and a drain electrode; and
a capacitor comprising an electrode functionally connected to the memory element through the oxide semiconductor film, the source electrode, and the drain electrode of the second transistor.
18. The semiconductor device according to claim 17 ,
wherein one of a source electrode and a drain electrode of the first transistor is electrically connected to one of the source electrode and the drain electrode of the second transistor, and
wherein the other of the source electrode and the drain electrode of the second transistor is electrically connected to the electrode of the capacitor.
19. The semiconductor device according to claim 17 ,
wherein the electrode of the capacitor and at least one of the source electrode and the drain electrode of the second transistor are made from a same film.
20. The semiconductor device according to claim 17 , further comprising:
an oxide insulating film containing oxygen, the oxide semiconductor film being interposed between the oxide insulating film and the gate insulating film,
wherein a region of the oxide insulating film is in direct contact with a region of the oxide semiconductor film, the region of the oxide semiconductor film overlapping with the gate electrode.
21. The semiconductor device according to claim 17 , further comprising:
a first insulating film, the first insulating film being an oxide insulating film containing oxygen; and
a second insulating film over the first insulating film,
wherein the oxide semiconductor film is interposed between the gate insulating film and the first insulating film, and
wherein a region of the first insulating film is in direct contact with a region of the oxide semiconductor film, the region of the oxide semiconductor film overlapping with the gate electrode through an opening in the second insulating film.
22. The semiconductor device according to claim 17 , further comprising:
a first insulating film, the first insulating film being a first oxide insulating film containing oxygen;
a second insulating film over the first insulating film; and
a third insulating film interposed between the first insulating film and the second insulating film, the third insulating film being a second oxide insulating film containing oxygen,
wherein the oxide semiconductor film is interposed between the gate insulating film and the first insulating film,
wherein a region of the first insulating film is in direct contact with a region of the oxide semiconductor film through an opening in each of the second insulating film and the third insulating film, the region of the oxide semiconductor film overlapping with the gate electrode, and
wherein a side portion of the oxide semiconductor film is in direct contact with the third insulating film.
23. The semiconductor device according to claim 17 ,
wherein the first transistor comprises silicon having crystallinity or germanium having crystallinity.
24. The semiconductor device according to claim 17 ,
wherein the first transistor comprises a channel formation region in a bulk semiconductor substrate.
25. The semiconductor device according to claim 17 ,
wherein the oxide semiconductor film of the second transistor includes a c-axis aligned crystalline oxide semiconductor.
26. The semiconductor device according to claim 17 ,
wherein the oxide semiconductor film of the second transistor comprises an In—Ga—Zn-based oxide.
27. The semiconductor device according to claim 17 ,
wherein the oxide semiconductor film of the second transistor comprises a material represented by InMO 3 (ZnO) m , where m>0 is satisfied, m is not an integer, and M represents one or more metal elements selected from Ga, Fe, Mn, and Co.
28. The semiconductor device according to claim 17 ,
wherein the oxide semiconductor film of the second transistor comprises a material represented by In 3 SnO 5 (ZnO) n where n>0 is satisfied, and n is not an integer.
29. A processing unit comprising the semiconductor device according to claim 17 .
30. A buffer memory device comprising the semiconductor device according to claim 17 .
31. A portable electronic device comprising the semiconductor device according to claim 17 .
32. A semiconductor device comprising:
a memory element comprising a first transistor;
an insulating film over the first transistor;
a second transistor over the insulating film, the second transistor comprising a gate electrode, an oxide semiconductor film overlapping with the gate electrode, a gate insulating film interposed between the gate electrode and the oxide semiconductor film, a source electrode, and a drain electrode;
a capacitor comprising an electrode functionally connected to the memory element through the oxide semiconductor film, the source electrode, and the drain electrode of the second transistor; and
a phase-inversion element comprising an input terminal electrically connected to one of a source electrode and a drain electrode of the first transistor and to one of the source electrode and the drain electrode of the second transistor.
33. The semiconductor device according to claim 32 ,
wherein the one of the source electrode and the drain electrode of the first transistor is electrically connected to the one of the source electrode and the drain electrode of the second transistor, and
wherein the other of the source electrode and the drain electrode of the second transistor is electrically connected to the electrode of the capacitor.
34. The semiconductor device according to claim 32 ,
wherein the electrode of the capacitor and at least one of the source electrode and the drain electrode of the second transistor are made from a same film.
35. The semiconductor device according to claim 32 , further comprising:
an oxide insulating film containing oxygen, the oxide semiconductor film being interposed between the oxide insulating film and the gate insulating film,
wherein a region of the oxide insulating film is in direct contact with a region of the oxide semiconductor film, the region of the oxide semiconductor film overlapping with the gate electrode.
36. The semiconductor device according to claim 32 , further comprising:
a first insulating film, the first insulating film being an oxide insulating film containing oxygen; and
a second insulating film over the first insulating film,
wherein the oxide semiconductor film is interposed between the gate insulating film and the first insulating film, and
wherein a region of the first insulating film is in direct contact with a region of the oxide semiconductor film through an opening in the second insulating film, the region of the oxide semiconductor film overlapping with the gate electrode.
37. The semiconductor device according to claim 32 , further comprising:
a first insulating film, the first insulating film being a first oxide insulating film containing oxygen;
a second insulating film over the first insulating film; and
a third insulating film interposed between the first insulating film and the second insulating film, the third insulating film being a second oxide insulating film containing oxygen,
wherein the oxide semiconductor film is interposed between the gate insulating film and the first insulating film,
wherein a region of the first insulating film is in direct contact with a region of the oxide semiconductor film through an opening in each of the second insulating film and the third insulating film, the region of the oxide semiconductor film overlapping with the gate electrode, and
wherein a side portion of the oxide semiconductor film is in direct contact with the third insulating film.
38. The semiconductor device according to claim 32 ,
wherein the first transistor comprises silicon having crystallinity or germanium having crystallinity.
39. The semiconductor device according to claim 32 ,
wherein the first transistor comprises a channel formation region in a bulk semiconductor substrate.
40. The semiconductor device according to claim 32 ,
wherein the oxide semiconductor film of the second transistor includes a c-axis aligned crystalline oxide semiconductor.
41. The semiconductor device according to claim 32 ,
wherein the oxide semiconductor film of the second transistor comprises an In—Ga—Zn-based oxide.
42. The semiconductor device according to claim 32 ,
wherein the oxide semiconductor film of the second transistor comprises a material represented by InMO 3 (ZnO) m , where m>0 is satisfied, m is not an integer, and M represents one or more metal elements selected from Ga, Fe, Mn, and Co.
43. The semiconductor device according to claim 32 ,
wherein the oxide semiconductor film of the second transistor comprises a material represented by In 3 SnO 5 (ZnO) n where n>0 is satisfied, and n is not an integer.
44. A processing unit comprising the semiconductor device according to claim 32 .
45. A buffer memory device comprising the semiconductor device according to claim 32 .
46. A portable electronic device comprising the semiconductor device according to claim 32 .
47. A semiconductor device comprising:
a memory element comprising a first transistor;
an insulating film over the first transistor;
a second transistor, the second transistor comprising a gate electrode, an oxide semiconductor film overlapping with the gate electrode, a gate insulating film interposed between the gate electrode and the oxide semiconductor film, a source electrode, and a drain electrode;
a capacitor comprising an electrode functionally connected to the memory element through the oxide semiconductor film, the source electrode, and the drain electrode of the second transistor;
a first phase-inversion element comprising a first input terminal and a first output terminal, the first input terminal being electrically connected to one of a source electrode and a drain electrode of the first transistor and to one of the source electrode and the drain electrode of the second transistor;
a second phase-inversion element comprising a second input terminal and a second output terminal, the second input terminal being electrically connected to the first output terminal of the first phase-inversion element; and
a third transistor electrically connected between the second output terminal and the first input terminal.
48. The semiconductor device according to claim 47 ,
wherein the first transistor comprises silicon having crystallinity or germanium having crystallinity.
49. The semiconductor device according to claim 47 ,
wherein the first transistor comprises a channel formation region in a bulk semiconductor substrate.