Adjusting threshold voltage for sophisticated transistors by diffusing a gate dielectric cap layer material prior to gate dielectric stabilization
View Patent ↗Sophisticated gate electrode structures may be formed by providing a cap layer including a desired species that may diffuse into the gate dielectric material prior to performing a treatment for stabilizing the sensitive gate dielectric material. In this manner, complex high-k metal gate electrode structures may be formed on the basis of reduced temperatures and doses for a threshold adjusting species compared to conventional strategies. Moreover, a single metal-containing electrode material may be deposited for both types of transistors.
1. A semiconductor device, comprising:
a first active region;
a first gate electrode structure formed on said first active region, said first gate electrode structure comprising a dielectric base material and a high-k dielectric material formed on said dielectric base material, said high-k dielectric material comprising a first threshold adjusting metal species in said first gate electrode structure;
a second active region;
a second gate electrode structure formed on said second active region, said second gate electrode structure comprising said dielectric base material and said high-k dielectric material formed on said dielectric base material, said high-k dielectric material comprising a second threshold adjusting metal species in said second gate electrode structure; and
a metal-containing electrode material, said metal-containing electrode material being formed on said high-k dielectric material in said first and second gate electrode structures.
2. The semiconductor device of claim 1 , wherein said first threshold adjusting species comprises aluminum and said second threshold adjusting species comprises lanthanum.
3. The semiconductor device of claim 1 , wherein said first gate electrode structure is formed on a threshold adjusting semiconductor alloy.
4. The semiconductor device of claim 1 , wherein said metal-containing electrode material comprises titanium and nitrogen.
5. The semiconductor device of claim 1 , wherein said first and second gate electrode structures further comprise a further electrode material formed on said metal-containing electrode material.
6. The semiconductor device of claim 5 , wherein said further electrode material comprises silicon.
7. The semiconductor device of claim 1 , wherein said high-k dielectric material in said first and second gate electrode structures forms an interface with said metal-containing electrode material and wherein said high-k dielectric material comprises at least one of nitrogen and oxygen at said interface so as to stabilize said interface.