Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein
Disclosed is a liquid processing apparatus including first and second cups installed so as to surround a rotation holding unit of a substrate and guide a processing liquid scattered from the rotating substrate downwards. A first driving unit and a second driving unit elevate the first cup and the second cup between a position receiving the processing liquid and the lower position thereof. A controller controls that the first cup and the second cup are ascended at the same time by transferring the driving force of the first driving unit while the first cup or a first elevating member thereof is overlapped with the second cup or a second elevating member thereof from the lower side by setting the ascending speed of the first cup to be higher than the ascending speed of the second cup when the first and second cups are ascended at the same time.
1. A liquid processing method comprising:
providing a liquid processing apparatus including a rotation holding unit configured to hold and rotate a substrate to be processed around a vertical shaft, a processing liquid supply unit configured to supply a processing liquid onto a target surface of the substrate held by the rotation holding unit, a first cup and a second cup installed to surround the substrate held on the rotation holding unit, wherein the second cup surrounds the first cup, and a first elevating member and a second elevating member each configured to elevate the first cup and the second cup, respectively, and change a set value of an elevating speed of the first cup and the second cup, respectively;
elevating the first cup and the second cup independently between a processing position receiving a processing liquid scattered from the substrate and a retracting position located lower than the processing position using the first elevating member and the second elevating member, respectively;
supplying the processing liquid onto the target surface of the substrate rotating around the vertical shaft using the processing liquid supply unit; and
ascending the first cup and the second cup to the processing position from the retracting position at the same time, wherein the first cup is ascended at a higher speed than the second cup such that the second cup is pushed up by the first cup while at least a portion of the first cup is overlapped with at least a portion of the second cup, thereby sealing a flow path formed between the first cup and the second cup.
2. The liquid processing method of claim 1 , further comprising:
descending the first cup and the second cup to the retracting position from the processing position at the same time, wherein the first cup is descended at a lower speed than the second cup such that the first cup is pushed down by the second cup while at least a portion of the second cup is overlapped with at least a portion of the first cup thereby sealing a flow path formed between the first cup and the second cup.
3. The liquid processing method of claim 1 , wherein a sealing part is installed in at least one side of the first cup and the second cup sealing a gap formed between the first cup and the second cup when the first cup and the second cup are ascended at the same time, the method further comprising:
positioning the second cup above the first cup where the gap is not sealed with the sealing part when the first cup and the second cup are descended up to the retracting position, and
ascending the first cup and the second cup at the same time after sealing the gap with the sealing part by starting ascending of the first cup to be faster than that of the second cup when the first cup and the second cup are ascended at the same time.
4. The liquid processing method of claim 2 , wherein a sealing part is installed in at least one side of the first cup and the second cup sealing a gap formed between the first cup and the second cup when the first cup and the second cup are descended at the same time, the method further comprising:
positioning the first cup below the second cup where the gap is not sealed with the sealing part when the first cup and the second cup are ascended up to the processing position, and
descending the first cup and the second cup at the same time after sealing the gap with the sealing part by starting the descending of the second cup to be faster than that of the first cup when the first cup and the second cup are descended at the same time.
5. A non-transitory computer-readable recording medium storing a program that, when executed, cause a computer to perform the liquid processing method comprising:
providing a liquid processing apparatus including a rotation holding unit configured to hold and rotate a substrate to be processed around a vertical shaft, a processing liquid supply unit configured to supply a processing liquid onto a target surface of the substrate held by the rotation holding unit, a first cup and a second cup installed to surround the substrate held on the rotation holding unit, wherein the second cup surrounds the first cup, and a first elevating member and a second elevating member each configured to elevate the first cup and the second cup, respectively, and change a set value of an elevating speed of the first cup and the second cup, respectively;
elevating the first cup and the second cup independently between a processing position receiving a processing liquid scattered from the substrate and a retracting position located lower than the processing position using the first elevating member and the second elevating member, respectively;
supplying the processing liquid onto the target surface of the substrate rotating around the vertical shaft using the processing liquid supply unit; and
ascending the first cup and the second cup to the processing position from the retracting position at the same time, wherein the first cup is ascended at a higher speed than the second cup such that the second cup is pushed up by the first cup while at least a portion of the first cup is overlapped with at least a portion of the second cup, thereby sealing a flow path formed between the first cup and the second cup.