Semiconductor light-emitting element, electrode structure and light-emitting device
It is an object to improve joining properties of electrodes and reliability of the electrodes for supplying electrical power to a semiconductor. The semiconductor light-emitting element includes an n-type semiconductor layer, a light-emitting layer, a p-type semiconductor layer, a transparent conductive layer, a p-electrode formed on the transparent conductive layer and an n-electrode formed on the n-type semiconductor layer. The p-electrode includes a p-side second metal layer composed of a metallic material containing Au and provided to be exposed to the outside and a p-side first metal layer composed of a metallic material containing Au with hardness higher than that of the metallic material composing the p-side second metal layer, the p-side first metal layer being provided closer to the transparent conductive layer than the p-side second metal layer along the p-side second metal layer.
1. A semiconductor light-emitting element comprising:
a first semiconductor layer that has a first conduction type;
a light-emitting layer that emits light by current flow and is laminated on the first semiconductor layer;
a second semiconductor layer that has a second conduction type and is laminated on the light-emitting layer;
a conductive layer that has conductivity and is laminated on the second semiconductor layer;
a first metal layer that is composed of a metallic material containing Au and is laminated on the conductive layer; and
a second metal layer that is composed of a metallic material containing Au and having an indentation hardness lower than an indentation hardness of the metallic material composing the first metal layer, the second metal layer being laminated on the first metal layer so that a surface thereof opposite to another surface contacting the first metal layer is exposed to outside,
wherein the first metal layer comprises a plurality of crystal grains of a columnar structure and the second metal layer comprises a plurality of crystal grains of a random cluster shape, and
the average size of the crystal grains of the first metal layer is larger than the average size of the crystal grains of the second metal layer.
2. The semiconductor light-emitting element according to claim 1 , wherein the first metal layer and the second metal layer are composed of metallic materials having a same constituent element.
3. The semiconductor light-emitting element according to claim 2 , wherein both of the first metal layer and the second metal layer are substantially composed of Au.
4. The semiconductor light-emitting element according to claim 3 , wherein a thickness of the first metal layer is larger than a thickness of the second metal layer.
5. The semiconductor light-emitting element according to claim 4 , wherein the first semiconductor layer is composed of a group III nitride semiconductor in which an electron is a carrier and the second semiconductor layer is composed of a group III nitride semiconductor in which a hole is a carrier.
6. The semiconductor light-emitting element according to claim 5 , wherein the conductive layer is a transparent conductive layer that has transparency to the light emitted by the light-emitting layer and is laminated on the second semiconductor layer.
7. The semiconductor light-emitting element according to claim 6 , wherein a third metal layer composed of a metallic material having an indentation hardness higher than the indentation hardness of the metallic material composing the first metal layer is laminated between the transparent conductive layer and the first metal layer.
8. The semiconductor light-emitting element according to claim 1 , wherein a thickness of the first metal layer is larger than a thickness of the second metal layer.
9. The semiconductor light-emitting element according to claim 1 , wherein the first semiconductor layer is composed of a group III nitride semiconductor in which an electron is a carrier and the second semiconductor layer is composed of a group III nitride semiconductor in which a hole is a carrier.
10. The semiconductor light-emitting element according to claim 9 , wherein the conductive layer is a transparent conductive layer that has transparency to the light emitted by the light-emitting layer and is laminated on the second semiconductor layer.
11. The semiconductor light-emitting element according to claim 10 , wherein a third metal layer composed of a metallic material having an indentation hardness higher than the indentation hardness of the metallic material composing the first metal layer is laminated between the transparent conductive layer and the first metal layer.
12. A light-emitting device comprising:
a semiconductor light-emitting element including:
a first semiconductor layer that has a first conduction type;
a light-emitting layer that emits light by current flow and is laminated on the first semiconductor layer;
a second semiconductor layer that has a second conduction type and is laminated on the light-emitting layer;
a conductive layer that has conductivity and is laminated on the second semiconductor layer;
a first metal layer that is composed of a metallic material containing Au and is laminated on the conductive layer; and
a second metal layer that is composed of a metallic material containing Au and having an indentation hardness lower than an indentation hardness of the metallic material composing the first metal layer, the second metal layer being laminated on the first metal layer so that a surface thereof opposite to another surface contacting the first metal layer is exposed to outside;
a bonding wire bonded to the second metal layer of the semiconductor light-emitting element; and
an electrical power supply member that supplies electrical power to the semiconductor light-emitting element through the bonding wire,
wherein the first metal layer comprises a plurality of crystal grains of a columnar structure and the second metal layer comprises a plurality of crystal grains of a random cluster shape, and
the average size of the crystal grains of the first metal layer is larger than the average size of the crystal grains of the second metal layer.
13. The light-emitting device according to claim 12 , wherein both of the first metal layer and the second metal layer are substantially composed of Au, and a thickness of the first metal layer is larger than a thickness of the second metal layer.
14. The light-emitting device according to claim 13 , wherein
the semiconductor light-emitting element includes:
other conductive layer that has conductivity and is laminated on the first semiconductor layer;
other first metal layer that is composed of a metallic material containing Au and is laminated on the other conductive layer; and
other second metal layer that is composed of a metallic material containing Au and having an indentation hardness lower than the indentation hardness of the metallic material composing the other first metal layer, the other second metal layer being laminated on the other first metal layer so that a surface thereof opposite to another surface contacting the other first metal layer is exposed to outside, and
the light-emitting device further comprises:
other bonding wire bonded to the other second metal layer of the semiconductor light-emitting element; and
other electrical power supply member that supplies electrical power to the semiconductor light-emitting element through the other bonding wire.
15. The light-emitting device according to claim 12 , wherein
the semiconductor light-emitting element includes:
other conductive layer that has conductivity and is laminated on the first semiconductor layer;
other first metal layer that is composed of a metallic material containing Au and is laminated on the other conductive layer; and
other second metal layer that is composed of a metallic material containing Au and having an indentation hardness lower than the indentation hardness of the metallic material composing the other first metal layer, the other second metal layer being laminated on the other first metal layer so that a surface thereof opposite to another surface contacting the other first metal layer is exposed to outside, and
the light-emitting device further comprises:
other bonding wire bonded to the other second metal layer of the semiconductor light-emitting element; and
other electrical power supply member that supplies electrical power to the semiconductor light-emitting element through the other bonding wire.