Object holding apparatus, and inspection apparatus
View Patent ↗In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.
1. An object holding apparatus comprising:
a rotating unit configured to rotate an object;
one or more tilting planes formed at an outer periphery of said rotating unit; and
one or more claws arranged at the outer periphery;
wherein the one or more tilting planes and the claws are configured to grip an edge of the object as a function of rotation of the rotating unit.
2. The object holding apparatus according to claim 1 , wherein a contact surface of said claws that presses the upper side of the outer peripheral side of said object and a rotation axis of the substrate form an acute angle.
3. The object holding apparatus according to claim 1 , wherein said claws are configured to restrict said object as a function of rotation of said rotating unit.
4. The object holding apparatus according to claim 3 , wherein said claws are configured to contact and press upper sides of outer peripheral sides of said object.
5. The object holding apparatus according to claim 1 , wherein said claws are configured to press said object as a function of rotation of said rotating unit.
6. The object holding apparatus according to claim 3 , further comprising a supply unit configured to supply a medium, wherein said claws are configured to press said object as a function of supplying said medium.
7. The object holding apparatus according to claim 1 , further comprising:
a slide unit configured to slide between an inner side and an outer side of said rotating unit as a function of rotation of said rotating unit; and
a rod configured to connect said slide unit to said claws.
8. The object holding apparatus according to claim 7 , wherein a length of said rod is shorter than a distance between a center of said rotating unit and said claws.
9. An inspection apparatus comprising:
a rotating unit configured to rotate an object;
one or more tilting planes formed at an outer periphery of said rotating unit;
one or more claws arranged at the outer periphery,
wherein the one or more tilting planes and the claws are configured to grip an edge of the object as a function of rotation of the rotating unit; and
an inspection section configured to inspect the object.
10. The inspection apparatus according to claim 9 , wherein a contact surface of said claws that presses the upper side of the outer peripheral side of said object and a rotation axis of the substrate form an acute angle.
11. The inspection apparatus according to claim 9 , wherein said claws are configured to restrict said object as a function of rotation of said rotating unit.
12. The inspection apparatus according to claim 11 , wherein said claws are configured to contact and press upper sides of outer peripheral sides of said object.
13. The inspection apparatus according to claim 9 , wherein said claws are configured to press said object as a function of rotation of said rotating unit.
14. The inspection apparatus according to claim 13 , further comprising a supply unit configured to supply a medium, wherein said claws are configured to press said object as a function of supplying said medium.
15. The inspection apparatus according to claim 9 , further comprising:
a slide unit configured to slide between an inner side and an outer side of said rotating unit as a function of rotation of said rotating unit; and
a rod configured to connect said slide unit to said claws.
16. The inspection apparatus according to claim 15 , wherein a length of said rod is shorter than a distance between a center of said rotating unit and said claws.