Inspection apparatus and inspection method
View Patent ↗An inspection apparatus includes a wafer stage for carrying a wafer, an illumination module which irradiates an inspection beam on the wafer carried on the wafer stage, a detection module which detects scattering rays or reflection rays from the wafer on the wafer stage and outputs an image signal, a coordinates control module which stores information about the arrangement of individual inspection areas on the wafer, and an imperfect area recognition module which recognizes, on the basis of the inspection area arrangement information stored in the coordinates control module, an imperfect inspection area interfering with a wafer edge.
1. An inspection apparatus for inspecting a substrate, the inspection apparatus comprising:
an illumination unit which illuminates the substrate with light, the substrate including a first area having only part of a first pattern thereon and a second area having at least part of a second pattern thereon, the first and second areas constituting portions of a third area, wherein the first area is missing a portion corresponding to another part of the first pattern such that the first pattern is only partially formed on the substrate;
a detection unit which detects light from the illuminated substrate and generates a signal of an image based on the detected light, the image including the first and second areas;
a memory which stores arrangement information of the first, second and third areas; and
a processing unit which uses the arrangement information to recognize imperfection of at least one of the first and second areas.
2. The inspection apparatus according to claim 1 , further comprising:
a scanning unit which performs a scanning motion relatively between the substrate and the illumination unit so as to scan the substrate using the illumination unit, wherein
the processing unit uses signals of an image including the imperfection and a reference image to determine existence of a defect, and wherein
the reference image is an image of an area which, relative to the area including the imperfection, is located on a side close to a center line of the substrate orthogonal to a scanning direction of the scanning unit.
3. The inspection apparatus according to claim 2 , wherein the reference image is an image of a perfect area having no defect.
4. The inspection apparatus according to claim 1 , wherein the processing unit acquires a threshold value for inspection by using signals of the image except for an imperfect portion thereof associated with the imperfection.
5. The inspection apparatus according to claim 1 , wherein the processing unit compares an image of a perfect area with a reference image.
6. An inspection method comprising:
illuminating a substrate with light, the substrate including a first area having only part of a first pattern thereon and a second area having at least part of a second pattern thereon, the first and second areas constituting portions of a third area, wherein the first area is missing a portion corresponding to another part of the first pattern such that the first pattern is only partially formed on the substrate;
detecting light from the illuminated substrate and generating a signal of an image based on the detected light, the image including the first and second areas;
recognizing, by use of arrangement information of the first, second and third areas stored in a memory, imperfection of at least one of the first and second areas.
7. The inspection method according to claim 6 , further comprising:
performing a scanning motion relatively between the substrate and the illumination light, and
using signals of an image including the imperfection and a reference image to determine existence of a defect,
wherein the reference image is an image of an area which, relative to the area including the imperfection, is located on a side close to a center line of the substrate orthogonal to a scanning direction of the scanning motion.
8. The inspection method according to claim 7 , wherein the reference image is an image of a perfect area having no defect.
9. The inspection method according to claim 6 , which includes acquiring a threshold value for inspection by using signals of the image except for an imperfect portion thereof associated with the imperfection.
10. The inspection method according to claim 6 , which includes comparing an image of a perfect area with a reference image.