IP Library Granted Patent US 8,807,515
Granted Patent B2
US 8,807,515 · App. 13/479,206 · Granted Aug 19, 2014

Instrumented platform for vibration sensitive equipment

Inventors: Vyacheslav M. Ryaboy (Irvine, CA); Warren Booth (Laguna Hills, CA)
Assignee: Newport Corporation
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Quick Facts
Patent No.
US 8,807,515
App. No.
13/479,206
Granted
Aug 19, 2014
Kind
B2
Abstract

A platform that includes a vibration sensor located within an inner core of a table. The table may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the table. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the table. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.

Claims (11)

1. A method of damping a vibration of a vibration-sensitive payload coupled to a platform assembly, comprising:

positioning at least one vibration sensor within an inner core of a tabletop forming the platform assembly, the inner core positioned between and in communication with at least one of a first surface and second surface of the tabletop;

positioning at least one damper within the inner core, the at least one damper in communication with the first surface of the tabletop;

coupling the vibration-sensitive payload to the first surface of the tabletop;

sensing at least one vibration of the first surface of the tabletop supporting the vibration-sensitive payload with the at least one vibration sensor;

damping the vibration of the first surface of tabletop supporting the vibration- sensitive equipment with the at least one damper,

controlling the at least one damper with at least one controller,

coupling the at least one controller to the at least one damper and the at least one vibration sensor, wherein the at least one controller receives data from the at least one vibration sensor and controls the at least one damper in response to the data, wherein the at least one controller causes the at least one damper to create an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of the first surface.

2. The method of claim 1 further comprising coupling the at least one controller to at least one of the at least one vibration sensor and at least one damper via at least one cable and electrical connector.

3. The method of claim 1 further comprising coupling the at least one controller to at least one of the at least one vibration sensor and at least one damper wireless sly.

4. The method of claim 1 further comprising monitoring at least one of the at least one vibration sensor and at least one damper via at least one external monitor.

Assignments (11)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 31, 2012
From: RYABOY, VYACHESLAV M.; BOOTH, WARREN
To: NEWPORT CORPORATION
Reel/Frame 028324/0736 →
Continuity (3)
Continuation 11986538 · Nov 21, 2007
Continuation 10693222 · Oct 24, 2003
Related Publication 20120235013A1 · Sep 20, 2012