Integrated resonator with a mass bias
An integrated resonator apparatus includes a piezoelectric resonator and an acoustic Bragg reflector formed adjacent the piezoelectric resonator. The integrated resonator apparatus also includes a mass bias formed over the Bragg reflector on a side of the piezoelectric resonator opposite the piezoelectric resonator.
1. An integrated resonator apparatus, comprising:
a piezoelectric resonator;
an acoustic Bragg reflector formed adjacent the piezoelectric resonator; and
a mass bias formed over the Bragg reflector on a side of the Bragg reflector opposite the piezoelectric resonator.
2. The integrated resonator apparatus of claim 1 wherein the mass bias comprises aluminum copper.
3. The integrated resonator apparatus of claim 1 further comprising a plurality of electrical contact pads for electrical contact to the piezoelectric resonator and formed of a material, and wherein the mass bias is formed of the same material as the contact pads.
4. The integrated resonator apparatus of claim 1 further comprising plastic mold fill encapsulating the mass bias, acoustic Bragg reflector, and piezoelectric resonator.
5. The integrated resonator apparatus of claim 1 wherein the mass bias is approximately 1 micron thick.