IP Library Granted Patent US 8,492,718
Granted Patent B2
US 8,492,718 · App. 13/485,686 · Granted Jul 23, 2013

Measurement apparatus and measurement method

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Quick Facts
Patent No.
US 8,492,718
App. No.
13/485,686
Granted
Jul 23, 2013
Kind
B2
Abstract

There is provided a measuring apparatus including a space arrangement structure that includes space regions surrounded by conductors in a plane, an electromagnetic wave emitter that emits electromagnetic waves towards an object held by the space arrangement structure, and an electromagnetic wave detector that measures the electromagnetic waves that have passed through the space arrangement structure. Here, characteristics of the object are measured by measuring the electromagnetic waves that have passed through the space arrangement structure. The electromagnetic waves emitted from the electromagnetic wave emitter towards the space arrangement structure are incident on the plane containing the space regions at an angle, and the electromagnetic waves that have passed through the space arrangement structure are measured.

Claims (24)

1. A measuring apparatus for measuring characteristics of an object, the measuring apparatus comprising:

a space arrangement structure that includes space regions surrounded by conductors in a plane;

an electromagnetic wave emitter that emits electromagnetic waves towards an object held by the space arrangement structure such that the electromagnetic waves are incident on a plane containing the space regions at an angle; and

an electromagnetic, wave detector that measures the electromagnetic waves that have passed through the space arrangement structure, wherein

the space regions of the space arrangement structure are regularly or periodically arranged and the size of each space region is no more than twice as large as a wavelength of the electromagnetic waves emitted from the electromagnetic wave emitter.

2. The measuring apparatus as set forth in claim 1 , wherein

the space arrangement structure holding the object is placed between the electromagnetic wave emitter and the electromagnetic wave detector in such a manner that the plane containing the space regions is inclined with respect to a straight line connecting together the electromagnetic wave emitter and the electromagnetic wave detector.

3. The measuring apparatus as set forth in claim 1 , wherein

the space arrangement structure holding the object is placed between the electromagnetic wave emitter and the electromagnetic wave detector in such a manner that the plane containing the space regions is orthogonal to a straight line connecting together the electromagnetic wave emitter and the electromagnetic wave detector, and

the electromagnetic waves emitted from the electromagnetic wave emitter are converged towards a single point on the straight line.

4. The measuring apparatus as set forth in claim 1 wherein

the space arrangement structure holding the object is placed between the electromagnetic wave emitter and the electromagnetic wave detector in such a manner that the plane containing the space regions is orthogonal to a straight line connecting together the electromagnetic wave emitter and the electromagnetic wave detector, and

the electromagnetic waves emitted from the electromagnetic wave emitter are converged into a straight line that (i) contains a single point on the straight line connecting together the electromagnetic wave emitter and the electromagnetic wave detector and (ii) is orthogonal to the straight line connecting together the electromagnetic wave emitter and the electromagnetic wave detector.

5. The measuring apparatus as set forth in claim 1 , further comprising:

an analyzer configured to measure characteristics of the object by comparing a position of a dip in a waveform of measured frequency characteristics of a transmittance of the space arrangement structure when the object is absent with a position of a dip in a waveform of measured frequency characteristics of a transmittance of the space arrangement structure when the object is present.

6. The measuring apparatus as set forth in claim 5 , wherein

the dip in the waveform is created due to incidence angle of the electromagnet waves with respect to a normal line of the plane containing the space regions.

7. The measuring apparatus as set forth in claim 1 , further comprising

a support film that is provided onto a surface of the space arrangement structure and is formed by a polyamide resin film.

8. A measuring method for measuring characteristics of an object, the measuring method comprising:

providing a space arrangement structure that includes space regions surrounded by conductors in a plane;

emitting electromagnetic waves towards an object held by the space arrangement structure such that the electromagnetic waves are incident on a plane containing the space regions at an angle; and

measuring the electromagnetic waves that have passed through the space arrangement structure, wherein

the space regions of the space arrangement structure are regularly or periodically arranged and the size of each space region is no more than twice as large as a wavelength of the emitted electromagnetic waves.

Assignments (1)
CHANGE OF ADDRESS Recorded Dec 18, 2018
From: ADVANTEST CORPORATION
To: ADVANTEST CORPORATION
Reel/Frame 047987/0626 →