IP Library › Granted Patent US 9,176,054
Granted Patent B2
US 9,176,054 · App. 13/491,322 · Granted Nov 3, 2015

System for tomographic imaging using coherent light that has a random phase distribution

Inventors: Isao Matsubara (Tucson, AZ); Chung-Chieh Yu (Tucson, AZ); William Dallas (Tucson, AZ)
Assignees: Canon Kabushiki Kaisha; THE ARIZONA BOARD OF REGENTS
G01N21/45G01B9/02024G01N21/4795G01B2290/40
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Quick Facts
Patent No.
US 9,176,054
App. No.
13/491,322
Granted
Nov 3, 2015
Kind
B2
Abstract

The present invention provides an apparatus for tomographic imaging of an object. The apparatus includes a light unit configured to generate illumination, which comprises coherent light and has random phase distribution in a plane perpendicular to an optical axis, for illuminating an object, a coupler which combines a reference beam and an object beam for an interference, a shifter configured to shift relative phase difference between the object light and the reference coherent light, a detector configured to detect an interference caused by the reference coherent light and object light for the each phase, and a processor configured to calculate an optical propagation based on the detected interference for the each phase.

Claims (29)

1. An apparatus for tomographic imaging of an object comprising:

a coherent light source that generates illumination, which comprises coherent light;

a separator configured to split the coherent light into a reference light and a illumination light;

a shifter configured to adjustably shift a relative phase difference between the illumination light and the reference light, by shifting the phase of the reference light or the illumination light;

a spatial phase adjuster configured to adjust the phase of the illumination light such that the illumination light has a random phase distribution in a plane perpendicular to the optical axis;

a coupler which combines the reference light and object light, wherein the object light is light from the object which has been illuminated by the illumination light, the reference light and the object light being interfered;

a detector configured to detect an interference caused by the reference light and the object light, wherein object light does not go through a phase shift aperture; and

a processor configured to calculate a complex amplitude for an optical propagation which reflects influence when the object light is assumed to go through the phase shift aperture based on the detected interference.

2. The apparatus according to claim 1 , wherein the spatial phase adjuster changes the illumination light as a first illumination which has a first random phase distribution to a second illumination which has a second random phase distribution, and the coupler, the shifter and the detector work for the first and second random distribution.

3. The apparatus according to claim 1 , wherein the illumination light is disk shape or annular shape.

4. The apparatus according to claim 1 , wherein the illumination light is a double annular shape or a double annular dot shape.

5. The apparatus according to claim 1 , wherein the shifter is also the spatial phase adjuster.

6. The apparatus according to claim 1 , wherein the shifter shifts the relative phase difference by changing the optical path length along the optical axis.

7. The apparatus according to claim 1 , wherein the processor is configured to calculate the optical propagation based on the detected interference for the each of four phase shifts of the shifter.

8. An apparatus for tomographic imaging of an object comprising:

a light unit configured to generate illumination, which comprises coherent light and has random phase distribution in a plane perpendicular to an optical axis, for illuminating an object;

a coupler which combines a reference light and an object light which is from the light unit and passed through the object, the reference light and the object light being interfered;

a shifter configured to shift relative phase difference between the object light and the reference light;

a detector configured to detect an interference caused by the reference light and object light for the each phase, wherein object light does not go through a phase shift aperture; and

a processor configured to calculate a complex amplitude which takes into consideration that the object light is assumed to have gone through the phase shift aperture based on the detected interference, and then to calculate a complex amplitude at a defocus position using numerical focusing.

9. An apparatus for tomographic imaging of an object comprising:

a separator configured to split coherent light into a reference light and a illumination light;

a shifter configured to adjustably shift a relative phase difference between the illumination light and the reference beam, by shifting the phase of the reference light or the illumination light;

a phase adjustment unit configured to adjust the phase of the illumination light such that the illumination light has a random phase distribution in a plane perpendicular to the optical axis;

a coupler which combines the reference light and object light, wherein the object light is light from the object which has been illuminated by the illumination light, the reference light and the object light being interfered;

a detector configured to detect an interference caused by the reference light and the object light, wherein object light does not go through a phase shift aperture; and

a processor configured to acquire a complex amplitude at a defocus position by calculating the detected interference using numerical focusing, and then calculate a complex amplitude which takes into consideration that the object light is assumed to have gone through the phase shift aperture based on the complex amplitude at the defocus position.

10. The apparatus according to claim 9 , further comprising a light unit configured to generate illumination, which comprises the coherent light, wherein the light unit includes the phase adjustment unit.

11. The apparatus according to claim 1 , wherein the imaging optical system includes an objective lens and a tube lens.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 7, 2012
From: MATSUBARA, ISAO; YU, CHUNG-CHIEH
To: CANON KABUSHIKI KAISHA
Reel/Frame 028338/0215 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 7, 2012
From: DALLAS, WILLIAM J.
To: THE ARIZONA BOARD OF REGENTS
Reel/Frame 028338/0320 →
Continuity (1)
Related Publication 20130329226A1 · Dec 12, 2013