Semiconductor device having antenna element and method of manufacturing same
View Patent ↗A semiconductor device (semiconductor module) includes a circuit board (module board) and a semiconductor element mounted on the circuit board. A shielding layer that blocks electromagnetic waves is disposed on the upper surface of the semiconductor element, and an antenna element is disposed over the shielding layer. The semiconductor element and the antenna element are electrically connected to each other by a connecting portion. This structure enables the semiconductor device to be reduced in size and to have both an electromagnetic-wave blocking function and an antenna function.
1. A semiconductor device comprising:
a circuit board;
a semiconductor element mounted on the circuit board;
a shielding layer including a resin and disposed directly only on an upper surface of the semiconductor element;
an antenna element disposed over the shielding layer;
an opening that passes through the shielding layer and reaches inside the semiconductor element;
a conductive carbide layer disposed on a sidewall portion of the opening in the shielding layer; and
a connecting portion that is disposed in the opening and passes through the shielding layer to be electrically connected to the semiconductor element and the antenna element.
2. The semiconductor device according to claim 1 , wherein the connecting portion includes a through-silicon via.
3. The semiconductor device according to claim 1 , wherein
the antenna element includes
a first antenna layer including a first metal material and disposed over the shielding layer,
a second antenna layer including a second metal material and disposed over the first antenna layer, and
a dielectric layer disposed between the first antenna layer and second antenna layer.
4. The semiconductor device according to claim 3 , wherein the antenna element includes a conductive portion that passes through the dielectric layer.
5. The semiconductor device according to claim 3 , wherein
the first antenna layer is not patterned, and
the second antenna layer has a waveguide pattern including a plurality of slot pairs arranged in a specific line.
6. The semiconductor device according to claim 1 , wherein
the antenna element includes
an antenna layer including a metal material and disposed over the shielding layer, and
a dielectric layer disposed between the shielding layer and the antenna layer.
7. The semiconductor device according to claim 1 , wherein the shielding layer includes the resin and magnetic particles.
8. The semiconductor device according to claim 1 , wherein the shielding layer is apart from the circuit board.
9. The semiconductor device according to claim 1 , wherein
the antenna element is disposed directly on the shielding layer, and
the connecting portion passes through the shielding layer.
10. A method of manufacturing a semiconductor device, the method comprising:
forming a shielding layer including a resin directly only on an upper surface of a semiconductor element;
forming an opening by laser irradiation so as to pass through the shielding layer and reach inside the semiconductor element;
forming a connecting portion in the opening so as to pass through the shielding layer and so as to be electrically connected to the semiconductor element;
forming an antenna element over the shielding layer so as to be electrically connected to the connecting portion; and
mounting the semiconductor element on a circuit board after the forming of the antenna element; wherein
in the forming of the opening by the laser irradiation, a conductive carbide layer is formed on a sidewall portion of the opening in the shielding layer.
11. The method according to claim 10 , wherein the connecting portion includes a through-silicon via that passes through the semiconductor element.
12. The method according to claim 10 , wherein
the forming of the antenna element includes forming the antenna element directly on the shielding layer.