High-k dielectric device and process
View Patent ↗An insulating layer is formed on a semiconductor substrate; and holes are patterned in the insulating layer where transistor gates are to be formed. A hard mask spacer layer is formed on the upper surface of the insulating layer and the holes. Next, the spacer layer is anisotropically etched to remove the portion of the spacer layer exposed at the bottom of each hole as well as the portion of the spacer layer on the upper surface of the insulating layer. However, the etching process does not remove all of the portion of the spacer layer formed on the substantially vertical sidewalls of the holes. A high-k dielectric layer is then formed on the remaining vertical portion of the spacer layer and on the exposed upper surfaces of the substrate and the insulating layer. A metal layer is then formed on the high-k dielectric layer; and individual gate structures are completed.
1. A method for fabricating a MOS transistor in a semiconductor substrate having a first conductivity type comprising:
forming source and drain regions by implanting in the semiconductor substrate ions having a second conductivity type;
forming an insulating layer on an upper surface of the semiconductor substrate;
removing a portion of the insulating layer to form a hole that exposes the upper surface of the semiconductor substrate between the source and drain regions;
forming a spacer layer on an upper surface of the insulating layer, on sidewalls of the hole in the insulating layer and on the exposed upper surface of the semiconductor substrate;
forming spacers by anistropically etching the spacer layer so as to remove the spacer layer on the upper surface of the semiconductor substrate, thereby exposing the upper surface of the semiconductor substrate, and to remove a portion of the spacer layer on the sidewalls of the insulating layer;
forming a high-k dielectric layer between the spacers on the exposed upper surface of the semiconductor substrate; and
forming a gate on the portion of the high-k dielectric layer formed between the spacers on the exposed upper surface of the semiconductor substrate; wherein a top surface of the gate is substantially co-planar with a top surface of the insulating layer.
2. The method of claim 1 further comprising forming electrical connections to the gate, the source region and the drain region.
3. The method of claim 1 further comprising forming LDD Regions.
4. The method of claim 1 wherein the spacer layer is a hard mask layer and the etching is performed using a plasma etch.
5. The method of claim 1 wherein the spacer layer is a layer of silicon nitride, a layer of carbon-doped silicon dioxide, or a layer of amorphous/plasma enhanced chemical vapor deposition(PECVD)carbon.
6. The method of claim 1 when the etching step is performed using a fluorine-deficient fluorocarbon plasma etchant.
7. A method for fabricating an integrated circuit structure in a semiconductor substrate comprising:
forming first source and drain regions by implanting ions having a first conductivity type in a first portion of the semiconductor substrate having a second conductivity type;
forming second source and drain regions by implanting ions having a second conductivity type in a second portion of the semiconductor substrate having a first conductivity type;
forming an insulating layer on an upper surface of the semiconductor substrate;
removing portions of the insulating layer to form holes that expose the upper surface of the semiconductor substrate between the first source and drain regions and between the second source and drain regions;
forming a spacer layer on an upper surface of the insulating layer, on sidewalls of the holes in the insulating layer and on the exposed upper surface of the semiconductor substrate;
anisotropically etching the spacer layer so as to remove both the spacer layer on the upper surface of the semiconductor substrate in the holes, thereby exposing the upper surface of the semiconductor substrate, and portions of the spacer layer on the sidewalls of the holes in the insulating layer;
forming a high-k dielectric layer on the exposed upper surface of the semiconductor substrate in the holes; and
forming gates on the portions of the high-k dielectric layer formed on the exposed upper surface of the semiconductor substrate in the holes.
8. The method of claim 7 further comprising forming electrical connections to the gate, the source region and the drain region.
9. The method of claim 7 further comprising forming LDD Regions.
10. The method of claim 7 wherein the spacer layer is a hard mask layer and the etching step is performed using a plasma etch.
11. The method of claim 7 wherein the spacer layer is a layer of silicon nitride, a layer of carbon-doped silicon dioxide, or a layer of amorphous/plasma enhanced chemical vapor deposition(PECVD)carbon.
12. The method of claim 7 when the etching step is performed using a fluorine-deficient fluorocarbon etchant.