Through silicon via impedance extraction

1. One or more non-transitory processor-readable storage media storing computer-executable instructions for causing one or more processors to perform a method, the method comprising:

receiving integrated circuit manufacturing process information and layout information of a layout design, the integrated circuit manufacturing process information comprising electrical characteristics of multi-layer substrates in or through which through-silicon vias in the layout design are to be fabricated;

performing a function fitting process to generate parameters of a representation for magneto-quasi-static dyadic vector potential Green's functions at a plurality of frequencies of interest based on the integrated circuit manufacturing process information, the representation using a summation involving Hankel funtions to represent an integral involving a diagonal element of the magneto-quasi-static dyadic vector potential Green's functions along a direction perpendicular to the multi-layer substrates;

computing matrix elements of a matrix for each frequency in the plurality of frequencies of interest based on the generated parameters, a set of electric current basis functions and the layout information, the set of electric current basis functions being cylindrical conduction mode basis functions, the matrix being a part of a linear system that formulates a relationship of electric current and electric potential difference in various regions associated with the through-silicon vias;

computing impedance values associated with the through-silicon vias based on the matrix elements; and

outputting the impedance values.

2. The one or more non-transitory processor-readable storage media recited in claim 1 , wherein the set of electric current basis functions include Bessel functions and trigonometric functions for solid through-silicon vias and Hankel functions and trigonometric functions for hollow through-silicon vias.

3. The one or more non-transitory processor-readable storage media recited in claim 1 , wherein the computing impedance values comprises:

determining right-hand-side column vectors of the linear system for each frequency in the plurality of frequencies of interest based on the set of electric current basis functions and voltage drops of the through-silicon vias; and

solving the linear system to compute impedance values for the through-silicon vias.

4. The one or more non-transitory processor-readable storage media recited in claim 1 , wherein the method further comprises:

performing a non-linear least square fit to derive a impedance netlist based on the impedance values for the plurality of frequencies of interest.

5. The one or more non-transitory processor-readable storage media recited in claim 1 , wherein the plurality of frequencies of interest is determined based on a maximum frequency of interest received.

6. The one or more non-transitory processor-readable storage media recited in claim 1 , wherein the outputting comprises storing the impedance values in computer memory or storage.

7. The one or more non-transitory processor-readable storage media recited in claim 1 , wherein the method further comprises:

storing the generated parameters in a database.

8. A method of impedance extraction, comprising:

with a computer,

receiving integrated circuit manufacturing process information and layout information of a layout design, the integrated circuit manufacturing process information comprising electrical characteristics of multi-layer substrates in or through which through-silicon vias in the layout design are to be fabricated;

performing a function fitting process to generate parameters of a representation for magneto-quasi-static dyadic vector potential Green's functions at a plurality of frequencies of interest based on the integrated circuit manufacturing process information, the representation using a summation involving Hankel funtions to represent an integral involving a diagonal element of the magneto-quasi-static dyadic vector potential Green's functions along a direction perpendicular to the multi-layer substrates;

computing matrix elements of a matrix for each frequency in the plurality of frequencies of interest based on the generated parameters, a set of electric current basis functions and the layout information, the set of electric current basis functions being cylindrical conduction mode basis functions, the matrix being a part of a linear system that formulates a relationship of electric current and electric potential difference in various regions associated with the through-silicon vias;

computing impedance values associated with the through-silicon vias based on the matrix elements; and

outputting the impedance values.

9. The method recited in claim 8 , wherein the set of electric current basis functions include Bessel functions and trigonometric functions for solid through-silicon vias and Hankel functions and trigonometric functions for hollow through-silicon vias.

10. The method recited in claim 8 , wherein the computing impedance values comprises:

determining right-hand-side column vectors of the linear system for each frequency in the plurality of frequencies of interest based on the set of electric current basis functions and voltage drops of the through-silicon vias; and

solving the linear system to compute impedance values for the through-silicon vias.

11. The method recited in claim 8 , further comprising:

performing a non-linear least square fit to derive a impedance netlist based on the impedance values for the plurality of frequencies of interest.

12. The method recited in claim 8 , wherein the plurality of frequencies of interest is determined based on a maximum frequency of interest received.

13. The method recited in claim 8 , wherein the outputting comprises storing the impedance values in computer memory or storage.

14. The method recited in claim 8 , further comprising:

storing the generated parameters in a database.

15. A system, comprising:

one or more processors, the one or more processors programmed to perform a method of impedance extraction, the method comprising:

receiving integrated circuit manufacturing process information and layout information of a layout design, the integrated circuit manufacturing process information comprising electrical characteristics of multi-layer substrates in or through which through-silicon vias in the layout design are to be fabricated;

performing a function fitting process to generate parameters of a representation for magneto-quasi-static dyadic vector potential Green's functions at a plurality of frequencies of interest based on the integrated circuit manufacturing process information, the representation using a summation involving Hankel funtions to represent an integral involving a diagonal element of the magneto-quasi-static dyadic vector potential Green's functions along a direction perpendicular to the multi-layer substrates;

computing matrix elements of a matrix for each frequency in the plurality of frequencies of interest based on the generated parameters, a set of electric current basis functions and the layout information, the set of electric current basis functions being cylindrical conduction mode basis functions, the matrix being a part of a linear system that formulates a relationship of electric current and electric potential difference in various regions associated with the through-silicon vias;

computing impedance values associated with the through-silicon vias based on the matrix elements; and

outputting the impedance values.

16. The system recited in claim 15 , wherein the set of electric current basis functions include Bessel functions and trigonometric functions for solid through-silicon vias and Hankel functions and trigonometric functions for hollow through-silicon vias.

17. The system recited in claim 15 , wherein the computing impedance values comprises:

determining right-hand-side column vectors of the linear system for each frequency in the plurality of frequencies of interest based on the set of electric current basis functions and voltage drops of the through-silicon vias; and

solving the linear system to compute impedance values for the through-silicon vias.

18. The system recited in claim 15 , wherein the method further comprises:

performing a non-linear least square fit to derive a impedance netlist based on the impedance values for the plurality of frequencies of interest.

19. The system recited in claim 15 , wherein the plurality of frequencies of interest is determined based on a maximum frequency of interest received.

20. The system recited in claim 15 , wherein the outputting comprises storing the impedance values in computer memory or storage.