IP Library Granted Patent US 9,184,037
Granted Patent B2
US 9,184,037 · App. 13/527,627 · Granted Nov 10, 2015

Mass spectrometer and mass analyzing method

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,184,037
App. No.
13/527,627
Granted
Nov 10, 2015
Kind
B2
Abstract

A mass spectrometer including a sample attaching member of attaching a sample, an ionizing chamber including an introductory port of the sample attaching member and an ionization source of generating a sample ion, a vacuumed chamber having a mass analyzer of analyzing the sample ion, and an opening/closing mechanism provided between the ionizing chamber and the vacuumed chamber, in which the opening/closing mechanism is controlled from a closed state to an open state after introducing the sample attaching member into the ionizing chamber to thereby enable to perform ionization with inconsiderable fragmentation at a high sensitivity with a high throughput.

Claims (48)

1. A mass spectrometer comprising:

a sample attaching member configured to attach to a sample;

an ionizing chamber, including: an introductory port to the sample attaching member, a heating element to vaporize a portion of the sample, and a pair of electrodes, one of which is located outside of the ionization chamber, provided by interposing a portion of the ionization chamber configured by a dielectric substance, wherein the vaporized portion of the sample is ionized within the ionizing chamber by ion-molecule reactions in a plasma generated by dielectric barrier discharge;

a vacuumed chamber, including a mass analyzer configured to analyze the ionized portion of the sample; and

an opening/closing mechanism provided between the ionizing chamber and the vacuumed chamber;

wherein the opening/closing mechanism is controlled to transition from a closed state to an open state after introducing the sample attaching member into the ionizing chamber;

wherein the pair of electrodes generating plasma and the plasma area in the ionizing chamber is disposed at a position closer to the vacuumed chamber than the position at which the sample are disposed in relation to the vacuumed chamber; and

wherein the vaporized portion of the sample is ionized when passed through the plasma area to introduce the ionized portion of the sample into the vacuumed chamber.

2. The mass spectrometer according to claim 1 , wherein the ionized portion of the sample is generated by reducing a pressure of the ionizing chamber to be equal to or higher than 100 Pa and equal to or lower than 5000 Pa from a side of the vacuumed chamber by bringing the opening/closing mechanism into the open state.

3. The mass spectrometer according to claim 1 , wherein a pressure of the vacuumed chamber in reducing the pressure of the ionizing chamber is equal to or lower than 0.1 Pa.

4. The mass spectrometer according to claim 1 , wherein the ionizing chamber includes an orifice of introducing a gas from an outer portion to an inner portion of the ionization source.

5. The mass spectrometer according to claim 4 , wherein the orifice includes an orifice opening/closing mechanism of controlling to introduce the gas.

6. The mass spectrometer according to claim 4 , wherein the gas is a heating gas which vaporizes the sample arranged at the sample attaching member.

7. The mass spectrometer according to claim 1 , wherein the ionizing chamber has a conductance by which a pressure in the ionizing chamber substantially stays the same all over the ionizing chamber.

8. The mass spectrometer according to claim 1 , wherein any pressure differential within the ionizing chamber is less than or equal to double the average pressure in the ionizing chamber.

9. The mass spectrometer according to claim 1 , wherein the sample attaching member is a rod-like sample introduction probe.

10. The mass spectrometer according to claim 9 , wherein a tip end of the sample introduction probe includes a filament and an adsorbent provided to the filament and an outer portion of the ionizing chamber includes a heating power source of heating the filament.

11. The mass spectrometer according to claim 1 , further comprising:

a light source of evaporating the sample arranged at the sample attaching member by irradiating the sample with light.

12. The mass spectrometer according to claim 1 , wherein, the ionization source, the opening/closing mechanism provided between the ionization source and the vacuumed chamber, and the vacuumed chamber are coaxially arranged to allow the ionized sample to pass through the opening/closing mechanism into the vacuumed chamber.

13. The mass spectrometer according to claim 1 , wherein the ionization source is connected with the vacuumed chamber, without an intervening differential pumping region.

14. The mass spectrometer according to claim 1 , further comprising:

a gas introducing slender pipe connected to the ionization source on a side opposed to the vacuumed chamber relative to the sample;

wherein a gas flow is produced from the gas introducing slender pipe to the vacuumed chamber, due to a difference between a pressure inside of the ionization source and the vacuumed chamber, and a pressure outside of the ionization source; and

wherein the gas flow transports sample ions into the vacuumed chamber.

15. The mass spectrometer according to claim 1 , wherein the sample vaporizing area and the ionizing area each is disposed along a pipe, and the inner diameter of the pipe proximate the sample vaporizing area being equal to the inner diameter of the pipe proximate the ionizing area is the same.

16. The mass spectrometer according to claim 1 , wherein the opening/closing mechanism is located between the ionizing chamber and an orifice which is an entrance of a housing containing mass analyzer without an intervening differential pumping region.

17. A mass analyzing method, using an ionizing chamber configured by a dielectric substance, the ionizing chamber including an introductory port to a sample attaching member configured to attach a sample and a pair of electrodes, one of which is located outside of the ionization chamber, provided by interposing a portion of the ionization chamber, generating plasma, a vacuumed chamber including a mass analyzer, and an opening/closing mechanism provided between the ionizing chamber and the vacuumed chamber, the mass analyzing method comprising:

reducing a pressure of the vacuumed chamber to be equal to or lower than 0.1 Pa in a state of closing the opening/closing mechanism;

introducing the sample attaching member arranged with the sample to the ionization source;

making a pressure of the ionizing chamber equal to or higher than 100 Pa and equal to or lower than 5000 Pa by bringing the opening/closing mechanism to an open state after introducing the sample attaching member;

vaporizing a portion of the sample;

generating an ionized portion of the sample arranged at the sample attaching member within the ionizing chamber by ion-molecule reactions in a plasma area, wherein a pair of electrodes and the plasma area are disposed in the ionizing chamber closer to the vacuumed chamber than the position at which the sample is disposed in relation to the vacuumed chamber and the vaporized portion of the sample is ionized when passed through the plasma area to introduce the ionized portion of the sample into the vacuumed chamber; and

analyzing a mass, by use of the mass analyzer, of the ionized portion of the sample introduced from the ionizing chamber to the vacuumed chamber.

18. The mass analyzing method according to claim 17 , further comprising:

producing a gas flow via a gas introducing slender pipe connected to the ionization source on a side opposed to the vacuumed chamber relative to the sample, wherein the gas flows to the vacuumed chamber due to a difference between a pressure inside of the ionization source and the vacuumed chamber, and a pressure outside of the ionization source; and

transporting sample ions into the vacuumed chamber via the gas flow.

19. A mass spectrometer comprising:

a sample attaching member configured to attach to a sample;

an ionizing chamber, including an introductory port to the sample attaching member, a heating element to vaporize a portion of the sample, and a pair of electrodes, one of which is located outside of the ionization chamber, provided by interposing a portion of the ionization chamber configured by a dielectric substance, wherein the vaporized portion of the sample is ionized within the ionizing chamber by ion-molecule reactions in a plasma generated by dielectric barrier discharge;

a vacuumed chamber, including a mass analyzer configured to analyze the ionized portion of the sample;

an opening/closing mechanism provided between the ionizing chamber and the vacuumed chamber; and

a gas introducing slender pipe connected to the ionizing chamber on a side opposed to the vacuumed chamber relative to the sample;

wherein the opening/closing mechanism is controlled to transition from a closed state to an open state after introducing the sample attaching member into the ionizing chamber;

wherein the pair of electrodes generating plasma and the plasma area in the ionizing chamber are disposed at a position closer to the vacuumed chamber than the position at which the sample is disposed in relation to the vacuumed chamber;

wherein the vaporized portion of the sample is ionized when passed through the plasma area;

wherein a gas flow is produced from the gas introducing slender pipe to the vacuumed chamber, due to a difference between a pressure inside of the ionization source and the vacuumed chamber, and a pressure outside of the ionization source; and

wherein the gas flow transports sample ions to introduce the ionized portion of the sample into the vacuumed chamber.

Assignments (2)
CHANGE OF NAME AND ADDRESS Recorded Mar 30, 2020
From: HITACHI HIGH-TECHNOLOGIES CORPORATION
To: HITACHI HIGH-TECH CORPORATION
Reel/Frame 052259/0227 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 6, 2012
From: KUMANO, SHUN; SUGIYAMA, MASUYUKI; HASHIMOTO, YUICHIRO; HASEGAWA, HIDEKI; YAMADA, MASUYOSHI; MOROKUMA, HIDETOSHI; HASHIBA, SHUHEI
To: HITACHI HIGH-TECHNOLOGIES CORPORATION
Reel/Frame 028730/0134 →