Actuator apparatus, test apparatus, and test method
View Patent ↗Provided is an actuator apparatus including: an actuator that is provided with a driving voltage at one end and a reference potential at the other end to enable driving; a first setting section that is connected to the one end of the actuator and sets an operating speed of the actuator; a second setting section that is provided between the one end of the actuator and the reference potential, and sets the driving voltage of the actuator.
1. An actuator apparatus comprising:
an actuator that is provided with:
a driving voltage at one end and a reference potential at the other end to enable driving;
a first setting section that is connected to the one end of the actuator and sets an operating speed of the actuator; and
a second setting section that is provided between the one end of the actuator and the reference potential, and adjusts a resistance of the second setting section to set the driving voltage of the actuator;
wherein the actuator includes:
a first contact;
a second contact opposing the first contact; and
a piezoelectric film that expands and contracts according to the driving voltage,
such that the actuator is a switch that moves the second contact by expansion and contraction of the piezoelectric film to contact or separate the second contact and the first contact.
2. The actuator apparatus according to claim 1 , further comprising:
an input terminal through which a control voltage is applied from outside, wherein
the first setting section includes a first resistance element connected between the input terminal and the one end of the actuator.
3. The actuator apparatus according to claim 1 , wherein
the second setting section includes a second resistance element connected between the one end of the actuator and the reference potential.
4. The actuator apparatus according to claim 2 , wherein
the first setting section includes at least one resistance element, and sets, to be the first resistance element, a resistance element selected according to the operating speed of the actuator.
5. The actuator apparatus according to claim 1 , wherein
the second setting section includes at least one resistance element, and sets a resistance element selected according to a default displacement amount of the actuator, to be a second resistance element connected between the one end of the actuator and the reference potential.
6. The actuator apparatus according to claim 1 , wherein
at least one of the first setting section and the second setting section includes a resistance element whose resistance value has been adjusted by trimming.
7. The actuator apparatus according to claim 1 , wherein
the first setting section includes a capacitance element connected between the one end of the actuator and the reference potential.
8. The actuator apparatus according to claim 7 , wherein
the first setting section includes at least one capacitance element, and connects a capacitance element selected according to the operating speed of the actuator between the one end of the actuator and the reference potential.
9. The actuator apparatus according to claim 1 , further comprising:
a mounting substrate on which the actuator is mounted, wherein
at least one of the first setting section and the second setting section is provided on the mounting substrate.
10. The actuator apparatus according to claim 1 , wherein
the piezoelectric film is formed to have an internal stress oriented in a predetermined direction, and the actuator is displaced by default in a predetermined direction by the internal stress.
11. The actuator apparatus according to claim 1 , further comprising:
a power source section that supplies, as a control voltage, a voltage equal to or greater than the driving voltage electrically connecting the first contact to the second contact, when a default displacement amount of the actuator is set to be zero.
12. A test apparatus for testing an actuator according to claim 1 , comprising:
a measuring section that is connected to the actuator, and measures correspondence between the driving voltage of the actuator and electric connection between a first contact and a second contact; and
a determining section that determines a circuit for the second setting section according to the correspondence.
13. The test apparatus according to claim 12 , wherein
the measuring section measures the operating speed of the actuator, and
the determining section determines a circuit for the first setting section according to the operating speed of the actuator.
14. A test method for testing the actuator according to claim 1 , comprising:
measuring correspondence between the driving voltage of the actuator and electric connection between a first contact and a second contact; and
determining a circuit for the second setting section according to the correspondence.