IP Library Granted Patent US 8,651,447
Granted Patent B2
US 8,651,447 · App. 13/535,745 · Granted Feb 18, 2014

Methods and devices for active vibration damping of an optical structure

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Quick Facts
Patent No.
US 8,651,447
App. No.
13/535,745
Granted
Feb 18, 2014
Kind
B2
Abstract

A vibration damper assembly that may be attached and moved about a payload or optical mount surface of an optical structure such as an optical table. The vibration damper assembly may include a sensor and an actuator that may be disposed within a housing. In some embodiments, the vibration damper assembly or components thereof may be incorporated into an optical structure in the form of an optical component to be disposed or mounted on an optical mount surface of an optical structure such as an optical table. Embodiments of the vibration damper system may include a controller in communication with the damper assembly Embodiments of the controller may use adaptive tuning, auto-ranging selection of gain factors and other features in order to optimize damping performance.

Claims (14)

1. A method of adaptively tuning a controller of an active vibration damper system, comprising:

disabling all control channels except one active channel in the vibration damper system for an optical structure, the vibration damper system including a plurality of vibration damper assemblies which each have a respective vibration sensor and actuator and the vibration damper system further including a controller coupled to the sensor and the actuator of each vibration damper assembly by a plurality of respective control channels;

increasing a gain factor of the active control channel until instability in the vibration damper system is detected;

reducing the gain factor by a small increment to re-achieve stability;

storing the gain factor that achieved stability;

repeating the above steps individually for any remaining control channels;

activating all control channels and increasing a gain factor to each control channel in an amount proportional to the respective stored gain factor for each respective control channel until instability is again detected; and

reducing the gain factor in small steps for each control channel until stability is achieved for the vibration damper system.

2. The method of claim 1 further comprising simultaneously reducing gain factor for each control channel in small steps proportional to the respective stored gain factor simultaneously to regain stability.

3. The method of claim 1 wherein reducing the gain factor is performed by a converging search method.

4. The method of claim 3 wherein the converging search method comprises a bisection method.

5. The method of claim 2 wherein reducing the gain factor is performed by a converging search method.

6. The method of claim 5 wherein the converging search method comprises a bisection method.

7. The method of claim 1 further comprising applying a safety factor reduction to each gain factor.

Assignments (11)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 3, 2014
From: RYABOY, VYACHESLAV M.; KASTURI, PRAKASH S.; NASTASE, ADRIAN S.
To: NEWPORT CORPORATION
Reel/Frame 031890/0776 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →