Method of forming a hermetically sealed fiber to chip connection
View Patent ↗Disclosed are methods of providing a hermetically sealed optical connection between an optical fiber and an optical element of a chip and a photonic-integrated chip manufactured using such methods.
1. A method of coupling an optical fiber to a chip, comprising:
providing a chip having a surface comprising a base surface and a chamfered surface adjacent to the base surface;
providing an optical fiber having a terminating end surface and a chamfered surface adjacent to the terminating end surface, wherein the terminating end surface and the chamfered surface of the optical fiber are activated in a plasma to generate dangling bonds on the terminating end surface and the adjacent chamfered surface, whereby the dangling bonds facilitate coupling with the surface of the chip;
directly contacting the terminating end surface of the optical fiber to the base surface of the chip such that the chamfered surface of the optical fiber directly contacts the chamfered surface of the chip; and
applying a pressure between the chamfered surface of the optical fiber and the chamfered surface of the chip to ensure no gaps are formed between the optical fiber and the chip.
2. The method of claim 1 , wherein the plasma is generated from a gas species containing oxygen, hydrogen, nitrogen, ammonia or argon.
3. The method of claim 2 , wherein the terminating end surface and the chamfered surface of the optical fiber are activated using reactive ion etching plasma or microwave radicals generated from the gas species.
4. An optical device manufacturing process, comprising:
providing an optical fiber having a terminating end surface and an adjacent chamfered surface, wherein the terminating end surface and the chamfered surface of the optical fiber are pre-activated in a plasma to generate dangling bonds on the terminating end surface and the chamfered surface of the optical fiber;
providing a chip having a surface with a base surface and a chamfered surface adjacent to the base surface;
connecting the pre-activated terminating end surface of the optical fiber to the base surface of the chip such that the terminating end surface of the optical fiber directly contacts the base surface of the chip and
the chamfered surface of the chip matches and aligns with the chamfered surface of the optical fiber; and
applying a pressure between the terminating end surface of the optical fiber and the base surface of the chip to ensure no gaps are formed between the optical fiber and the chip surface.
5. The process of claim 4 , wherein the plasma is generated from a gas species containing oxygen, hydrogen or argon.
6. The process of claim 4 , further comprising the step of annealing the chip at a temperature of at least 200 degrees Celsius, wherein the annealing step is performed after the connecting step.
7. The process of claim 4 , wherein the chamfering of the optical fiber is performed before the terminating end surface and the chamfered surface of the optical fiber are pre-activated.
8. The process of claim 4 , wherein the connecting step occurs within two hours of pre-activating the terminating end surface and the chamfered surface of the optical fiber.
9. The method of claim 1 , wherein the activated terminating end surface of the optical fiber forms a hermetic seal with the base surface of the chip.
10. The method of claim 1 , wherein the chip comprises an optical waveguide and the optical fiber forms at least one covalent bond directly with the optical waveguide.
11. The method of claim 10 , wherein the optical fiber forms a hermetic seal with the optical waveguide.
12. The method of claim 10 , wherein the at least one covalent bond is a silicon to silicon covalent bond.